Semes Co., Ltd.

Samsung Corning Precision Materials Co., Ltd.

Jeong Yeong Park

Joo Young Lee

Seo Hyun Kim

Gun Sang Yoon

Eun Ho Choi

Young Ha Kim

Seong Soo Lee

Hyunhee Lee

Il Hee Baek

Young Zo Yoo

June Hyong Park

Kang Suk Lee

Byung Chul Kang

Sung Bum Park

Kiyoung Kwark

Se Jeong Choi

Jeoung Eun Park

Disclosed is a method for cleaning a photo mask. The method includes a pre-treatment operation of wetting a chemical on an entire surface of the photo mask in a state in which the photo mask is stopped, and a cleaning operation of supplying the chemical to a pattern area of the photo mask in a state in which the photo mask is rotated.

Mask cleaning apparatus and method for cleaning mask

Disclosed are an apparatus and a method for liquid-treating a substrate. The method for liquid-treating a substrate includes a first treatment liquid supplying operation of supplying a first treatment liquid to a treatment location of the substrate, and a wetting operation of, after the first treatment liquid supplying operation, supplying a wetting liquid onto the substrate, wherein the wetting operation includes a simultaneous supply operation of supplying the wetting liquid to the first location while the first treatment liquid is supplied, and wherein the first location is a location deviating from the treatment location. Accordingly, the surface of the substrate may be prevented from being dried while the treatment liquid is converted to a wetting liquid.

Apparatus and method for treating substrate

A metal oxide thin film substrate for an organic light-emitting device (OLED) which exhibits superior light extraction efficiency and can be easily fabricated at low cost and a method of fabricating the same and a method of fabricating the same. The metal oxide thin film substrate for an OLED includes a base substrate and a metal oxide thin film formed on the base substrate, the metal oxide thin film being made of a mixture of at least two metal oxides having different refractive indices.

Metal oxide thin film substrate for OLED and method of fabricating the same

Growing community of inventors

Chungcheongnam-do, South Korea

Jeong Yeong Park