Korea Electrotechnology Research Institute

New Optics, Ltd.

Jeong Woo Jeon

Sung Il Chung

Do Hyun Kang

Hyeon Seok Oh

Hyeon Taeg Kim

S A Nikiforov

Mitica Caraiani

Pan Kyeom Kim

Jong Moon Kim

Yeon Ho Jeong

Sergey Alexandrovich Nikiforov

Hyeon Taeg Gim

Yeong Han Chun

Hyun Seok Oh

Chang Rin Lee

Disclosed is an apparatus and method for low-temperature plasma immersion processing of a variety of workpieces using accelerated ions, wherein low-temperature plasma is distributed around a cylindrical workpiece placed in a chamber, the workpiece is enclosed with a housing including a multi-slot extracting electrode to isolate the workpiece from plasma, and a negative potential sufficient to induce sputtering is applied to the workpiece and the electrode, so that ions from plasma are accelerated within the sheath formed between the extracting electrode and plasma, pass through the slot part of the electrode and bombard the workpiece, thus polishing the surface of the workpiece. This apparatus and method is effective for surface smoothing to ones of nm of large cylindrical substrates particularly substrates for micro or nanopattern transfer. This method includes plasma cleaning, surface activating, surface smoothing, dry etching, deposition, plasma immersion ion implantation and deposition within a single or multi chamber.

Plasma immersion ion milling apparatus and method

The present invention provides a cylindrical magnetic levitation stage and an exposure apparatus, which can form a nanoscale pattern of a large area directly on the surface of a large cylinder. The present invention provides an exposure apparatus including a new type of cylindrical magnetic levitation stage, which can levitate, rotate, and move a cylinder in the axial direction by the principle of magnetic levitation in a non-contact manner and form a nanoscale pattern on the surface of the cylinder, and a light source for irradiating light on the surface of the cylinder, thereby reducing the position error of the cylindrical magnetic levitation stage to a nanoscale size and correcting the error caused by mechanical processing in real time. Moreover, the present invention provides an exposure apparatus, which includes a differential vacuum means combined with the cylindrical magnetic levitation stage to create a partial vacuum environment between the light source and the surface of the cylinder, and thus it is possible to employ light sources such as X-rays, electron beams, extreme ultraviolet (EUV) rays, etc.

Cylindrical magnetic levitation stage and lithography

The present invention relates to an inductively coupled plasma processing chamber and method for a cylindrical workpiece with a three-dimensional profile, and more particularly to an inductively coupled plasma processing reactor and method for a cylindrical workpiece with a three-dimensional profile, in which the workpiece serving as an internal RF antenna is connected to an RF power source through an impedance matching network at one end, and a terminating capacitor at another end so as to achieve low plasma contamination, confine dense uniform plasma in the substrate vicinity and suppress secondary electrons emitted from the substrate, and a plasma process can be applied to a 3-D linear semiconductor device, a metal, glass, ceramic or polymer substrate having planar or 3-D structured micro or nano patterns, and the like.

Method and chamber for inductively coupled plasma processing for cylinderical material with three-dimensional surface

The present invention provides a cylindrical magnetic levitation stage which includes a cylindrical substrate used to form micro-patterns of various arbitrary shapes on a large-area semiconductor substrate or display panel substrate, a cylindrical substrate, a combination of a first permanent magnet array and a first coil array and a combination of a first permanent magnet array and a first coil array, which are coupled to the cylindrical substrate, so that levitation, axial translation and rotation of the cylindrical substrate can be made finely through the control of a magnetic force generated by the interaction between a magnetic field generated by electric current applied to the coil arrays and a magnetic field generated from the permanent magnet arrays corresponding to the coil arrays.

Cylindrical magnetic levitation stage

A transverse flux linear motor with permanent magnet excitation having a stator including stator cores and windings respectively wound around the stator cores and supplied with current, and a mover arranged at a central portion of the stator, the mover including mover cores and permanent magnets. Each of the permanent magnets is arranged between adjacent ones of the mover cores. Each stator core has a pair of column portions spaced apart from each other by a desired distance. The windings are arranged in pairs such that each of the winding pairs has two windings wound around respective column portions of an associated one of the stator cores.

Transverse flux linear motor with permanent magnet excitation

The present invention relates to an integrated system in which a bilateral permanent magnet excited synchronous motor part and a non-contact power feeding part are combined in order to generate a linear driving force and to feed an electric power without any contact. The present integrated system comprises a bilateral permanent magnet excited synchronous motor for generating a linear driving force; and a non-contact power feeding apparatus for receiving an electric power without any mechanical contact from the bilateral permanent magnet excited synchronous motor, wherein the bilateral permanent magnet excited synchronous motor is composed of a stator core with a long air-gap formed at one side, a stator motor windings inducing traveling magnetic fields in the stator core, stator transformer wires winding both flanks of the stator core, and a motor runner sliding longitudinally along the air-gap, and wherein the non-contact power feeding apparatus is composed of a secondary core, and secondary wires winding the secondary core. The present invention enables non-contact power supply by simply installing a long core at the part of a runner and winding wires around the long core and a stator transformer, therefore, this non-contact power feeding way reduces the cost of system manufacture and provides very clean transportation system.

Growing community of inventors

Changwon-si, South Korea

Jeong Woo Jeon