Samsung Electronics Co., Ltd.

Jeong Su Ha

Jong Su Kim

Chang Hoon Choi

Ho Seok Choi

Mi Jeong Song

Myung Ho Jung

Sergey Antonov

Sung Chai Kim

Vasily Lenyashine

Hyeong Min Ahn

Young Su Ryu

Won Guk Seo

An inspection apparatus for a semiconductor process and a semiconductor process device, the inspection apparatus including a transferer configured to transfer a process object between a plurality of chambers; at least one line camera installed above the transferer, the at least one line camera being configured to generate an original image by capturing an image of the process object transferred by the transferer; and a controller configured to receive the original image and to perform an inspection of the process object by correcting distortion of the original image due to a change in transfer speed of the transferer.

Inspection apparatus for semiconductor process and semiconductor process device

A TFT array inspecting apparatus inspects a TFT array disposed at either an inclined position and a level position. The TFT array inspecting apparatus includes a vacuum chamber, a stage disposed in the vacuum chamber so that a TFT array to be inspected is disposed on the stage, an electron gun disposed opposite to the stage in the vacuum chamber to generate an electron beam onto the TFT array, an electron detecting unit to detect secondary electrons emitted from the TFT array by the electron gun, and at least one elevating unit to move the TFT array move between a level position and an inclined position having a designated angle with the level position.

TFT array inspecting apparatus

Growing community of inventors

Suwon-si, South Korea

Jeong Su Ha