Globalfoundries Inc.

Jeong Soo Kim

Andy C Wei

Francis M Tambwe

Matthew Thomas Herrick

Norman Chen

Yuyang Sun

Sohan Singh Mehta

Shyam Pal

A device disclosed herein includes a plurality of spaced-apart fin structures formed in a semiconductor substrate so as to define an alignment/overlay mark trench. An alignment/overlay mark includes at least one insulating material positioned within the alignment/overlay mark trench. The alignment/overlay mark is devoid of any of the fin structures.

Methods of forming alignment marks and overlay marks on integrated circuit products employing FinFET devices and the resulting alignment/overlay mark

One illustrative method disclosed herein includes forming a plurality of spaced-apart fin structures in a semiconductor substrate, wherein the fin structures define a portion of an alignment/overlay mark trench where at least a portion of an alignment/overlay mark will be formed, forming at least one layer of insulating material that overfills the alignment/overlay mark trench and removing excess portions of the layer of insulating material positioned above an upper surface of the plurality of fins to thereby define at least a portion of the alignment/overlay mark positioned within the alignment/overlay mark trench. A device disclosed herein includes a plurality of spaced-apart fin structures formed in a semiconductor substrate so as to partially define an alignment/overlay mark trench, an alignment/overlay mark consisting only of at least one insulating material positioned within the alignment/overlay mark trench, and a plurality of FinFET semiconductor devices formed in and above the substrate.

Methods are provided for fabricating semiconductor integrated circuits including isolated trench features. In one embodiment, a method includes providing a semiconductor substrate with an overlying process layer. A trench pattern to be etched into the process layer is determined and that trench pattern is decomposed into first and second patterns, the second pattern including an isolated trench. First and second lithographic masks are formed to implement the first and second patterns, the second mask implementing the second pattern, the isolated trench, and a plurality of density balancer patterns symmetrically positioned with respect to the isolated trench. A first resist layer is patterned with the first lithographic mask and the process layer is etched with the first resist layer. A second resist layer is patterned with the second lithographic mask and the process layer is etched with the second resist layer to implement the required trench pattern in the process layer.

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Clifton Park, NY, United States of America

Jeong Soo Kim