Stmicroelectronics S.a.

Stmicroelectronics (crolles 2) Sas

Pmdtechnologies Ag

Infineon Technologies Ag

Jens Prima

Michel Marty

François Roy

Francois Roy

Michael Bernhard Sommer

Henning Feick

Dirk Offenberg

Stefano Parascandola

Matthias Franke

Robert Roessler

Didier Dutartre

Francois Leverd

Pascal Besson

Christoph Kamerow

An optical sensor device configured to detect a time of flight of an electromagnetic signal includes a semiconductor substrate having a main surface and a conversion region configured to convert at least a fraction of the electromagnetic signal into photo-generated charge carriers; a first control electrode formed in a trench extending from the main surface into the semiconductor substrate; a second control electrode disposed directly or indirectly on the main surface; a control circuit configured to apply a varying first potential to the first control electrode and to apply a varying second potential to the second control electrode, where the varying second potential has a fixed phase relationship to the first varying potential, to generate electric potential distributions in the conversion region to direct the photo-generated charge carriers; and a readout node arranged in the semiconductor substrate and configured to detect the directed photo-generated charge carriers.

Optical sensor device with deep and shallow control electrodes

An optical sensor device configured to detect a time of flight of an electromagnetic signal includes a semiconductor substrate with a conversion region configured to convert at least a portion of the electromagnetic signal into photo-generated charge carriers. A deep control electrode is formed in a trench extending into the semiconductor substrate. The deep control electrode extends deeper into the semiconductor substrate than a shallow control electrode. A control circuit is configured to apply to the deep control electrode and to the shallow control electrode varying potentials having a fixed phase relationship to each other, to generate electric potential distributions in the conversion region, by which the photo-generated charge carriers in the conversion region are directed. The directed photo-generated charge carriers are detected at at least one readout node.

An optical sensor device includes a semiconductor substrate including a conversion region to convert an electromagnetic signal into photo-generated charge carriers, a read-out node configured to read-out a first portion of the photo-generated charge carriers, a control electrode, which is formed in a trench extending into the semiconductor substrate, and a doping region in the semiconductor substrate, where the doping region is adjacent to the trench, where the doping region has a doping type different from the read out node, and where the doping region has a doping concentration so that the doping region remains depleted during operation.

Optical sensor device having a depleted doping region adjacent to a control electrode and method for manufacturing the optical sensor device

The present invention provides a time-of-flight sensor () including at least one time-of-flight pixel () for demodulating a received modulated light beam (Sp), wherein the time-of-flight pixel () comprises at least two integrating nodes (Ga, Gb) and the integration nodes (Ga, Gb) are connected to a device () for charge compensation, wherein the charge compensation device () comprises at least two SBI input transistors (M, M) which at a potential (Ua, Ub) of the integration nodes (Ga, Gb) which according to the amount exceeds an SBI threshold value (U) drive SBI current transistors (M, M) such that at both integration nodes (Ga, Gb) a compensating current (i) of the same level flows, wherein the source terminals of the SBI-current transistors (M, M) are not connected to a supply voltage (U) but are connected to a working voltage (U, U) (FIG.).

Light propagation time sensor with a charge compensation device

A back-side illuminated image sensor formed from a thinned semiconductor substrate, wherein: a transparent conductive electrode, insulated from the substrate by an insulating layer, extends over the entire rear surface of the substrate; and conductive regions, insulated from the substrate by an insulating coating, extend perpendicularly from the front surface of the substrate to the electrode.

Back-side illuminated image sensor provided with a transparent electrode

A method for forming a back-side illuminated image sensor, including the steps of: a) forming, from the front surface, doped polysilicon regions, of a conductivity type opposite to that of the substrate, extending in depth orthogonally to the front surface and emerging into the first layer; b) thinning the substrate from its rear surface to reach the polysilicon regions, while keeping a strip of the first layer; c) depositing, on the rear surface of the thinned substrate, a doped amorphous silicon layer, of a conductivity type opposite to that of the substrate; and d) annealing at a temperature capable of transforming the amorphous silicon layer into a crystallized layer.

Back-side illuminated image sensor with a junction insulation

An integrated imaging device includes a silicon layer provided over a dielectric multilayer. The dielectric multilayer includes a top silicon-dioxide layer, an intermediate silicon-nitride layer and a bottom silicon-dioxide layer. Imaging circuitry is formed at a frontside of the silicon layer. An isolating structure surrounds the imaging circuitry and extends from the frontside through the silicon layer and top silicon-dioxide layer into and terminating within the intermediate silicon-nitride layer. A filter for the imaging circuitry is mounted to a backside of the bottom silicon-dioxide layer. The isolating structure is formed by a trench filled with a dielectric material.

Process for fabricating a backside-illuminated imaging device and corresponding device

A method for forming a back-side illuminated image sensor from a semiconductor substrate, including the steps of: a) thinning the substrate from its rear surface; b) depositing, on the rear surface of the thinned substrate, an amorphous silicon layer of same conductivity type as the substrate but of higher doping level; and c) annealing at a temperature enabling to recrystallized the amorphous silicon to stabilize it.

Method for forming a back-side illuminated image sensor

Method for forming a back-side illuminated image sensor with a junction insulation

A process for producing a microelectronic device includes producing a first semiconductor substrate which includes a first layer and a second layer present between a first side and a second side of the substrate. First electronic components and an interconnecting part are produced on and above the second side. The substrate is then thinned by a first selective etch applied from the first side and stopping on the first layer followed by a second selective etch stopping on the second layer. A second substrate is attached over the interconnecting part. The electronic components may comprise optoelectronic devices which are illuminated through the second layer.

Microelectronic device, in particular back side illuminated image sensor, and production process

An optical semiconductor device includes, in a zone (), a structure of photosensitive diodes including a matrix () of lower electrodes (), an intermediate layer () made of a photosensitive material formed on the matrix of lower electrodes and at least one upper electrode () formed on the intermediate layer, in which an electrical connection () includes at least one electrical contact pad () and at least one electrical connection pad () are produced beneath the intermediate layer, at least one electrical connection via () is produced through the intermediate layer and connects the upper electrode to the electrical contact pad and at least one well () is formed outside the zone () and passes through at least the intermediate layer () in order to expose the electrical connection pad (). Also provided is a process for fabricating such a device.

Growing community of inventors

Siegen, Germany

Jens Prima