Ruhr-universitat Bochum

Jens Oberrath

Thomas Musch

Christian Schulz

Martin Lapke

Robert Storch

Peter Awakowicz

Christian Zietz

Thomas Mussenbrock

Ilona Rolfes

Ralf Peter Brinkmann

Tim Styrnoll

The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals.

Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma

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Bochum, Germany

Jens Oberrath