Advanced Micro Devices Corporation

Von Ardenne Anlagentechnik Gmbh

Jens Meyer

Frank Barth

Michael Hentschel

Hubertus Von Der Waydbrink

Andrej Wolf

Siegfried Scheibe

Alexander Krebs

René Röllig

Uwe Traeber

Apparatus for continuous coating has a chamber wall which forms a processing chamber, thermal insulation which forms a processing area within the chamber, a transportation device for substrates located in the processing area with a substrate transportation direction of the substrates lying in the lengthwise extension of the apparatus for continuous coating, and heating equipment which heats the substrates, is designed to minimize unwanted coating, in particular of parts of the apparatus, in order to minimize the expense of maintaining and servicing the apparatus A condensation element is positioned in the processing chamber, which extends into the processing area and binds the arising vapor through condensation.

Apparatus for continuous coating

An on-chip event timer apparatus including a hardware timer and a debug interface. The hardware timer includes at least an up-counter for counting clocks of a clock signal, a match register for storing a programmable count value, and a comparator for monitoring whether the up-counter's count value matches the count value of the match register. The debug interface includes enable control unit for enabling the up-counter's operation based on a pre-defined relationship between a state of an enabled signal supplied to said up-counter and an internal state of the hardware timer. Additionally, the debug interface may comprise a clock divider connected to the enable control unit to reduce the clock's frequency in accordance with a pre-programmed divider value. Based on the received clock with the reduced clock frequency, the enable control unit adapts the up-counter's processing speed to the reduced clock frequency.

Debug interface for an event timer apparatus

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Dresden, Germany

Jens Meyer