Sensirion Ag

Jens Kubasch

Felix Mayer

Mark Hornung

Moritz Lechner

For measuring the flow and the thermal conductivity of a fluid, a sensor is used, which has a first temperature detector for measuring a first temperature and a second temperature detector for measuring a second temperature. A heating is arranged between the temperature detectors. Two measured quantities are determined by means of the temperature detectors, a first of which is e.g. a difference between the temperatures and a second one of which is one of the temperatures. By comparing the two measured quantities, the flow and the thermal conductivity of the fluid can be determined.

Device and method for measuring the flow and at least one material parameter of a fluid

A flow detector comprises at least two housing parts with a semiconductor chip having an integrated flow sensor arranged between the housing parts. An opening is provided in one of the housing parts and at least one metal pin extends through the opening and forms an electrical lead-through. A hardened filler material is used for sealing the lead-through against the walls of the opening. This construction provides a well sealed cavity for the fluid to be measured and can be manufactured easily.

Flow detector with lead-throughs and method for its production

A device for measuring the flow of a fluid has a primary duct and a bypass arranged in series to the primary duct. The bypass has a first section and a second section. A baffle plate with a hole for the passage of the fluid is arranged in the first section. The second section comprises two parallel secondary ducts. In the first section, a turbulent flow dominates, while the flow in the second section is primarily laminar. If the turbulent effects in the bypass are sufficiently strong, the ratio of the flows in the primary duct and the bypass can be substantially independent of the fluid properties and of the flow rate. By using two parallel secondary ducts in the second section, high flow rates and therefore strongly turbulent effects can be achieved without exceeding the measuring range of the sensor.

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Zurich, Switzerland

Jens Kubasch