Samsung Display Co., Ltd.

Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Pulsar Photonics Gmbh

Jens Holtkamp

Choong-Ho Lee

Arnold Gillner

Doh-Hyoung Lee

Sung-Sik Yun

Tong-Jin Park

Nelli Hambach

Stephan Eifel

Lasse Büsing

Alexander Gatej

Patrick Gretzki

Joachim Ryll

Martin Traub

A laser processing apparatus includes: a laser generator that generates a laser beam, a diffractive optical element that divides the laser beam generated by the laser generator into a plurality of sub-laser beams, and a beam gap adjustor that adjusts a gap between neighboring ones of the plurality of sub-laser beams. Therefore, by installing a diffractive optical element that divides a laser beam that is generated by the laser generator into the plurality of sub-laser beams and a beam gap adjustor to adjust a gap between a plurality of sub-laser beams, the laser processing apparatus can form a processing pattern of various resolutions in a shadow mask while improving a processing speed of the shadow mask.

Laser processing apparatus

A laser processing apparatus includes a laser generator for generating laser beams, a diffraction optic element for dividing the laser beam generated by the laser generator into a plurality of sub-laser beams, and a beam number controller for controlling the number of the plurality of sub-laser beams. Accordingly, the diffractive optic element that splits a laser beam generated by the laser beam generator into a plurality of sub-laser beams and the beam number controller that controls the number of sub-laser beams are provided so that the processing speed of a processing target can be improved and, at the same time, the number of laser beams can be promptly controlled, thereby promptly forming various patterns of the processing target.

Growing community of inventors

Wassenberg, Germany

Jens Holtkamp