Ams International Ag

Ams Ag

Jens Hofrichter

Colin Steele

Jan Enenkel

Goran Stojanovic

Gerhard Eilmsteiner

Jochen Kraft

Catalin Lazar

Desislava Oppel

Deborah Morecroft

Thomas MÜLLER

Guy Meynants

Josef Pertl

Thomas Troxler

Dominik Hollinger

Thomas FRÖHLICH

Michael Leitner

Andreas Fitzi

A filter assembly includes an incident medium, a spacer, at least one dielectric filter and an exit medium. The spacer is arranged between the incident medium and the at least one dielectric filter such that the incident medium and the at least one dielectric filter are spaced apart by a working distance and thereby enclose a medium of lower index of refraction than the incident medium. The at least one dielectric filter is arranged on the exit medium.

Filter assembly, detector, and method of manufacture of a filter assembly

A photonic device includes a semiconductor substrate and a pressure-sensitive membrane. The pressure-sensitive membrane is arranged in or on the substrate. A photonic structure is at least partly coupled to the membrane and arranged to change an optical property depending on a deformation to be induced by a pressure applied to the membrane.

Photonic device, method for operating a photonic device and method for manufacturing a photonic device

An integrated optical transducer for detecting dynamic pressure changes comprises a micro-electro-mechanical system, MEMS, die having a MEMS diaphragm with a first side exposed to the dynamic pressure changes and a second side, and an application-specific integrated circuit, ASIC, die having an optical interferometer assembly. The interferometer assembly comprises a beam splitting element for receiving a source beam from a light source and for splitting the source beam into a probe beam in a first beam path and a reference beam in a second beam path, a beam combining element for combining the probe beam with the reference beam to a superposition beam, and a detector configured to generate an electronic interference signal depending on the superposition beam. The MEMS die is arranged with respect to the ASIC die such that a gap is formed between the second side of the diaphragm and the ASIC die, with the gap defining a cavity and having a gap height. The first beam path of the probe beam comprises coupling into the cavity, reflection off of a deflection point or a deflection surface () of the diaphragm and coupling out of the cavity.

Integrated optical transducer and method for detecting dynamic pressure changes

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Eindhoven, Netherlands

Jens Hofrichter