Mks Instruments, Inc.

Applied Science & Technology, Inc.

Jens Fittkau

Johannes Seiwert

Christiane Gottschalk

Ulrich Alfred Brammer

Joachim Lohr

Stephan Levine

Christine Gottschalk

An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.

Ozone concentration sensor

The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.

Ozonated water flow and concentration control apparatus and method

Ozonated water flow and concentration control method

Ozonated water flow and concentration control apparatus

Growing community of inventors

Berlin, Germany

Jens Fittkau