Excelitas Noblelight Gmbh

Heraeus Noblelight Gmbh

Jens Büngener

Larisa Von Riewel

Bernhard Graziel

Vincent Krafft

Michael Tittmann

A method for at least partially drying a substrate. The method includes: (a) directing a supply air flow onto the substrate with a direction component in either the transport direction, or the opposite direction and (b) directing an exhaust air flow away from the substrate. The method is reproducible and effective and achieves an improved result with respect to the homogeneity and speed of drying because the exhaust air flow is split into a plurality of sub-flows by supplying each of the sub-flows to an individual intake channel, and because, in the event of a supply air flow in the transport direction of movement of the substrate, the supply air flow is arranged spatially upstream of the exhaust air flow and, in the event of a supply air flow in the opposite direction, the supply air flow is arranged spatially downstream of the exhaust air flow.

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Hanau, Germany

Jens Büngener