Northrop Grumman Systems Corporation

Northrop Grumman Space & Mission Systems Corporation

Jennifer Wang

Po-Hsin Liu

Wayne Yoshida

Weidong Liu

Jane Lee

Linh Dang

Mike Barsky

Michael Edward Barsky

Richard Lai

Xiaobing Mei

Gerry Mei

Rich Lai

Huai-Min Sheng

In a method of forming a semiconductor device on a semiconductor substrate (), a photoresist layer () is deposited on the semiconductor substrate; a window () is formed in the photoresist layer () by electron beam lithography; a conformal layer () is deposited on the photoresist layer () and in the window (); and substantially all of the conformal layer () is selectively removed from the photoresist layer () and a bottom portion of the window to form dielectric sidewalls () in the window ().

High electron mobility transistor semiconductor device and fabrication method thereof

Accordingly, this invention relates to an dry etching process for semiconductor wafers. More particularly, the present invention discloses a dry etching process including a halogen etchant () and a nitrogen gas () that selectively etches a compound semiconductor material () faster than the front-side metal layers (A)(B). Further, the dry etching process produces a vertical wall profile on compound semiconductor material () in both X () and Y () crystalline directions without undercutting the top of a via-opening.

Dry etching process for compound semiconductors

A method of dry plasma etching a semiconductor structure (), having at least one semiconductor material layer (), on a semiconductor wafer (), involving a dry plasma reaction gas mixture () being chemically selected for, and having an etch rate corresponding to, each semiconductor material layer (); dividing the semiconductor structure () into a masked portion () and an unmasked portion (); and sequentially exposing the unmasked portion () of the semiconductor structure () to the dry plasma reaction gas mixture ().

Method of dry plasma etching semiconductor materials

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Redondo Beach, CA, United States of America

Jennifer Wang