Entegris, Inc.

Jennifer Marrs

George Gonnella

Robert F McLoughlin

Marc Brian Laverdiere

Iraj Gashgaee

Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.

Liquid flow controller and precision dispense apparatus and system

A proportional fluid control valve with improved linearity and reduced hysteresis is disclosed. The valve allows for smooth, gentle flow of fluid in a substantially linear fashion, with minimal turns. Preferably the valve is pneumatically actuated. Where temperature is not an issue, the valve can be actuated by any suitable means, including stepper motors, linear motors, voice coils or other force actuators. A versatile molded valve body that requires fewer parts compared to a machined valve is disclosed. In one embodiment, the molded valve body is designed specifically for flow control and contains two sensor housings with carefully positioned flow paths to optimize the use of space. The sensor housing or housings can be separately formed as inserts, allowing installation in various orientations.

Fluid control apparatus including a proportional flow valve having a fluid inlet and a fluid outlet; a pneumatic proportional control valve in communication with the proportional flow valve for modulating the proportional flow valve; a frictional flow element having a frictional flow element fluid inlet in fluid communication with the fluid outlet of the proportional flow valve and having a frictional flow element fluid outlet spaced from the frictional flow element fluid inlet, an upstream pressure sensor; a downstream pressure sensor; and a controller in communication with the upstream pressure sensor, the downstream pressure sensor and the pneumatic proportional control valve.

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Cornish, NH, United States of America

Jennifer Marrs