International Business Machines Corporation

Jennifer Fullam

Su Chen Fan

Muthumanickam Sankarapandian

Christopher Joseph Waskiewicz

Yongan Xu

Karen Elizabeth Petrillo

A photoresist is developed on a semiconductor wafer. The wafer is introduced into a controlled cold temperature environment and is maintained there until inelastic thermal contraction of the developed photoresist material results in reducing the critical dimension (CD) of the photoresist by not less than 10% from its value before exposure to the controlled cold temperature environment. Then the semiconductor wafer is removed from the controlled cold temperature environment.

Reducing line edge roughness and mitigating defects by wafer freezing

Embodiments of the invention include a method of forming a multi-layer integrated circuit (IC) structure that includes forming a first layer of the multi-layered IC structure, wherein the first layer includes a trench having a liner and a conductive interconnect formed in the trench. The liner is formed such that it is not on a portion of a sidewall of the conductive interconnect. A multi-segmented cap is formed having a first cap segment and a second cap segment. The first cap segment is on a top surface of the conductive interconnect, and a first portion of the second cap segment is on the portion of the sidewall of the conductive interconnect. The second cap segment is on a top surface of the first cap segment.

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Clifton Park, NY, United States of America

Jennifer Fullam