Taiwan Semiconductor Manufacturing Comp. Ltd.

Realtek Semiconductor Inc.

Jen-hao Yeh

Li-Jui Chen

Po-Chung Cheng

Chun-Lin Louis Chang

Han-Lung Chang

Yen-Shuo Su

Ting-Ya Cheng

Jhan-Hong Yeh

Henry Yee Shian Tong

Wei-yi Wei

Chih Chieh Yen

Te Lung Fang

A method for monitoring a shock wave in an extreme ultraviolet light source includes irradiating a target droplet in the extreme ultraviolet light source apparatus of an extreme ultraviolet lithography tool with ionizing radiation to generate a plasma and to detect a shock wave generated by the plasma. One or more operating parameters of the extreme ultraviolet light source is adjusted based on the detected shock wave.

Shock wave visualization for extreme ultraviolet plasma optimization

A communication apparatus and an associated method are disclosed. The communication apparatus includes differential input ports; a signal pairing circuit, arranged for coupling the differential input ports to a receiving circuit, wherein when the signal pairing circuit operates in a first mode, a positive input port and a negative input port of the differential input ports correspondingly electrically couple to a positive input terminal and a negative input terminal of the receiving circuit, when the signal pairing circuit operates in a second mode, the positive input port and the negative input port of the differential input ports correspondingly electrically couple to the negative input terminal and the positive input terminal of the receiving circuit; a processor circuit, arranged for determining whether the decoded signal includes a specific code before the timer is time out and generating a determination result; and control the signal pairing circuit according to the determination result.

Communication apparatus and associated method

Growing community of inventors

Hsinchu, Taiwan

Jen-hao Yeh