Samsung Electronics Co., Ltd.

Jegwan Hwang

Shaofeng Ding

Jihyung Kim

Jeonghoon Ahn

Wonji Park

JaeHee Oh

Jaehee Oh

A metal-insulator-metal capacitor includes a first electrode disposed in a first region of an upper surface of a substrate, a second electrode covering the first electrode and extending to a second region surrounding an outer periphery of the first region, a third electrode covering the second electrode and extending to a third region surrounding an outer periphery of the second region, a first dielectric layer disposed between the first electrode and the second electrode to cover an upper surface and a side surface of the first electrode and extending to the second region, and a second dielectric layer disposed between the second electrode and the third electrode to cover an upper surface and a side surface of the second electrode and extending to the third region and in contact with the first dielectric layer.

Growing community of inventors

Suwon-si, South Korea

Jegwan Hwang