Therma-wave, Inc.

Nova Measuring Instruments Ltd.

Revera, Incorporated

Kla Tencor Corporation

Onto Innovation Inc.

Schueler, Bruno W.

Fanton, Jeffrey Thomas

Reed, David A.

Smedt, Rodney

Jeffrey Thomas Fanton

Jon Opsal

Rodney C Smedt

David Allen Reed

Bruno W Schueler

Heath A Pois

Craig E Uhrich

Lena Nicolaides

Alex Salnik

David E Aspnes

Lawrence D Rotter

David Y Wang

Jeffrey E McAninch

Allan Rosencwaig

Lanhua Wei

Haiming Wang

Louis N Koppel

Bruno Shueler

A system and method for measuring a sample by X-ray reflectance scatterometry. The method may include impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles; and collecting at least a portion of the scattered X-ray beam.

System and method for measuring a sample by x-ray reflectance scatterometry

Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.

Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS)

An optical metrology device includes an aperture that can be adjusted based on the thickness of the film on a sample. The aperture is adjusted to have a first aperture configuration or a second aperture configuration, where the second aperture configuration allows more light to pass. The aperture may be adjusted to use the second aperture configuration, e.g., if the thickness of the film produces a lateral shift from each internal reflection in the film at least 80% of the measurement spot size or the film thickness is greater than a predesignated amount, or if the light measured with the first aperture configuration and second aperture configuration differs by more than a predetermined threshold. The aperture may be in the source arm of the optical system, e.g., between the light source and the sample, or the receiver arm of the optical system, e.g., between the sample and the detector.

Optical metrology device for measuring samples having thin or thick films

Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)

Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a method of fabricating a platelet of a monochromator for X-ray photoelectron spectroscopy involves placing a crystal on a stage of an X-ray measuring apparatus, the crystal having a top surface. The method also involves measuring, by X-ray reflection, an orientation of a crystal plane of the crystal, the crystal plane beneath the top surface of the crystal and having a primary axis. The method also involves measuring a surface angle of the top surface of the crystal by measuring a light beam reflected from the top surface of the crystal.

Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy

Systems and methods for characterizing films by X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a system for characterizing a film may include an X-ray source for generating an X-ray beam having an energy below the k-edge of silicon. A sample holder may be included for positioning a sample in a pathway of the X-ray beam. A first detector may be included for collecting an XPS signal generated by bombarding the sample with the X-ray beam. A second detector may be included for collecting an X-ray fluorescence (XRF) signal generated by bombarding the sample with the X-ray beam. Monitoring/estimation of the primary X-ray flux at the analysis site may be provided by X-ray flux detectors near and at the analysis site. Both XRF and XPS signals may be normalized to the (estimated) primary X-ray flux to enable film thickness or dose measurement without the need to employ signal intensity ratios.

System and method for characterizing a film by X-ray photoelectron and low-energy X-ray fluorescence spectroscopy

A modulated reflectance measurement system includes three monochromatic diode-based lasers. Each laser can operate as a probe beam or as a pump beam source. The laser outputs are redirected using a series of mirrors and beam splitters to reach an objective lens. The objective lens focuses the laser outputs on a sample. Reflected energy returns through objective and is redirected by a beam splitter to a detector. A lock-in amplifier converts the output of the detector to produce quadrature (Q) and in-phase (I) signals for analysis. A Processor uses the Q and/or I signals to analyze the sample. By changing the number of lasers used as pump or probe beam sources, the measurement system can be optimized to measure a range of different samples types.

Modulated reflectance measurement system with multiple wavelengths

The subject invention relates to a broadband optical metrology system that segregates the broadband radiation into multiple sub-bands to improve overall performance. Each sub-band includes only a fraction of the original bandwidth. The optical path&#x2014;the light path that connects the illuminator, the sample and the detector&#x2014;of each sub-band includes a unique sub-band optical system designed to optimize the performance over the spectral range spanned by the sub-band radiation. All of the sub-band optical systems are arranged to provide small-spot illumination at the same measurement position. Optional purging of the individual sub-band optical paths further improves performance.

Measurement system with separate optimized beam paths

A modulated reflectance measurement system includes two diode-based lasers for generating a probe beam and an intensity modulated pump beam. The pump and probe beams are joined into a collinear beam using a laser diode power combiner. One or more optical fibers are used to transport the beams either before and/or after they are combined. The collinear beam is focused through one or more lenses or other optical components for collimation. The collinear beam is then focused by an objective lens onto a sample. Reflected energy returns through an objective and is redirected by a beam splitter to a detector. A lock-in amplifier converts the output of the detector to produce quadrature (Q) and in-phase (I) signals for analysis. A processor uses the Q and/or I signals to analyze the sample.

Modulated reflectance measurement system with fiber laser technology

Growing community of inventors

Los Altos, CA, United States of America

Jeffrey Thomas Fanton