Advanced Energy Industries, Inc.

Jeffrey Roberg

Denis M Shaw

Myeong Yeol Choi

Steve Jordan

Mike Mueller

Michael L Mueller

Scott Polak

A radio-frequency (RF) generator is provided that includes an exciter, a power amplifier, a filter, a sensor, and a frequency-tuning subsystem. The frequency-tuning subsystem includes a non-transitory, tangible, machine-readable medium containing instructions to perform a method that includes receiving an impedance trajectory of the plasma load; receiving a reference point in a complex-reflection-coefficient plane, the reference point lying on a reference vector passing through the reference point and the origin; receiving, from the sensor, a measured impedance of the plasma load; determining a measurement angle between a reference vector and a line passing through the reference point and a point in the complex-reflection-coefficient plane corresponding to the measured impedance; scaling the measurement angle by a predetermined constant to produce a frequency step; adding the frequency step to the initial frequency to produce an adjusted frequency; and causing the exciter to generate a signal oscillating at the adjusted frequency.

Apparatus for frequency tuning in a RF generator

This disclosure describes systems, methods, and apparatus for rapidly detecting smoke or other particles or aerosols generated in any one or more compartments of a multi-compartment electronics enclosure. The herein disclosed system includes a particle sensor and an airflow controller that pulls air and particles from the one or more compartments through fluid pathways and into the particle sensor.

Aspirating particle sensor for smoke detection within an electronics enclosure

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Longmont, CO, United States of America

Jeffrey Roberg