At&t Bell Laboratories

Bell Telephone Laboratories

At&t Technologies, Inc.

Jeffrey R Bessette

Paul A Kohl

Duane E Bacon

Photoelectrochemical processing of semiconductors is highly desirable because of its versatility and simplicity. The invention is a photoelectrochemical etching procedure for n-type silicon in which an alcohol based solution of hydrofluoric acid is used as the electrolyte. This procedure is useful for the fabrication of a variety of silicon devices.

Photoelectrochemical etching of n-type silicon

A process is described for plating silver on metallic surfaces electrically attached to a compound semiconductor. This process involves a photoelectrochemically induced oxidation reaction in which the compound semiconductor is oxidized and reduction to metallic silver takes place on the metallic surface electrically connected to the semiconductor. This procedure is particularly valuable where silver is to be plated in small holes or crevices in the semiconductor structure. It is particularly valuable because plating is specific to the metallic surface and does not occur on the semiconductor surface. It is useful in providing low inductance electrical connections to various parts of semiconductor devices such as in the source for gallium arsenide field effect transistors. Silver is particularly valuable in such applications because of its chemical inertness, high electrical conductivity and exceptionally high thermal conductivity which permits high transistor power handling capabilities.

Growing community of inventors

Piscataway, NJ, United States of America

Jeffrey R Bessette