Cypress Semiconductor Corporation

Jeffrey P Geuea

Jesse C Ramos

Michael B Allen

Allan T Nelson

Provided herein is a method of processing an electronic device including operating a processing chamber at a first temperature while a workpiece is being processed and removing the workpiece and a carrier holding the workpiece from the processing chamber while decreasing the temperature within the processing chamber to a second temperature significantly lower than the first temperature. The method also includes increasing the temperature within the processing chamber to a third temperature significantly greater than the second temperature and significantly less than the first temperature while the processing chamber has no workpiece or carrier within.

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Bastrop, TX, United States of America

Jeffrey P Geuea