Uniphase Corporation

Jeffrey M Marx

Robert W Ade

Jack Lin

A method of fabricating an optical device incorporates two different techniques for formation of different structures of the device on the same substrate. Individual processes such as Titanium indiffusion and annealed proton exchange in LiNbO.sub.3 require significantly different temperature ranges for comparable waveguide formation. The present method combines these processes and allows for temperature tuning of the optical parameters of passive and active components, for instance coupling lengths of directional couplers, associated with one section of the device without altering the optical parameters of similar components in the other sections. The process improves yield for devices which employ more than one precisely fabricated optical directional coupler by creating an extra degree of process freedom.

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Simsbury, CT, United States of America

Jeffrey M Marx