American Science and Engineering, Inc.

Pri Automation, Inc.

Jeffrey M Denker

Aaron Judy Couture

Peter John Rothschild

Richard Mastronardi

Dan-Cristian Dinca

Jeffrey R Schubert

David Blake

Aaron D Pailes

Riley Phelps

Domenic Martignetti

Lee Grodzins

Mitchell Weiss

Martin Rommel

Richard Schueller

Anatoli Arodzero

Joseph Callerame

Michael Chesna

Rajen Sud

Jason Toppan

Jeffrey Illig

John T Hickey

Peter J B Teague

David Jordan

Jonathan Gordan

Jonathan Edward Everett

Robyn Smith

David R Blake

The present specification describes a system for synchronizing a transmission detector and a backscatter detector integrated with a portable X-ray scanner. The system includes a transmitter connected with the transmission detector for transmitting the analog detector signal and a receiver connected with the scanner for receiving the transmitted analog detected signal where the transmitter and the receiver operate in the ultra-high frequency range.

Methods and systems for synchronizing backscatter signals and wireless transmission signals in x-ray scanning

The present specification provides a detector for an X-ray imaging system. The detector includes at least one high resolution layer having high resolution wavelength-shifting optical fibers, each fiber occupying a distinct region of the detector, at least one low resolution layer with low resolution regions, and a single segmented multi-channel photo-multiplier tube for coupling signals obtained from the high resolution fibers and the low resolution regions.

Handheld backscatter imaging systems with primary and secondary detector arrays

The present specification describes an X-ray detector that includes at least one scintillator screen for absorbing incident X rays and emitting corresponding light rays, a wavelength shifting sheet (WSS) coupled with the at least one scintillator screen for shifting the emitted light rays, at least one wavelength shifting fiber (WSF) coupled with at least one edge of the WSS for collecting the shifted light rays, and a photodetector for detecting the collected light rays.

Wavelength-shifting sheet-coupled scintillation detectors

Wireless transmission detector panel for an X-ray scanner

Spectral discrimination using wavelength-shifting fiber-coupled scintillation detectors

Methods for discriminating among x-ray beams of distinct energy content. A first volume of scintillation medium converts energy of incident penetrating radiation into scintillation light which is extracted from a scintillation light extraction region by a plurality of optical waveguides that convert the scintillation light to light of a longer wavelength. An x-ray beam initially incident upon the first volume of scintillation medium and traversing the first volume is then incident on a second volume of scintillation medium. The first and second scintillation media may be separated by an absorber or one or more further volumes of scintillation medium, and may also have differential spectral sensitivities. Scintillation light from the first and second scintillation volumes is detected in respective detectors and processed to yield a measure of respective low energy and high-energy components of the incident x-ray beam.

Hand-held X-ray detection system using wavelength-shifting fiber-coupled scintillation detectors

An x-ray inspection system using backscatter of an x-ray beam emitted through a scan panel contiguous with, but of a material distinct from, an enclosure that contains an x-ray source by which the x-ray beam is generated. The scan panel is contoured in such a manner as to be visibly blended with a shape characterizing the enclosure. In some embodiments, the beam traverses multiple scan panels, where one or more of the scan panels may be selected for beam filtration properties. The scan panel may be disposed interior to a sliding door, and may be structured to serve as a scatter shield.

Convertible scan panel for x-ray inspection

Methods for inspecting contents of a container. High-energy penetrating radiation collimated into a fan beam illuminates an inspected container from one side, while a plurality of detector plates are disposed on the opposite side of the container. Each detector plate has a plurality of detector modules, each of which, in turn, is disposed on a remotely activated alignment and has multiple detector elements. A controller governs the orientation of each of the plurality of detector plates based at least on the detector signal generated by its detector elements such that each detector element of each detector module of each detector plate may be aligned to within a specified fraction of the transverse dimension of the fan beam as measured at the exit slot.

Methods for high energy X-ray imaging using remotely-aligned arcuate detector array

A scanning system and methods for inspecting contents of a container. High-energy penetrating radiation collimated into a fan beam illuminates an inspected container from one side, while a plurality of detector plates are disposed on the opposite side of the container. Each detector plate has a plurality of detector modules, each of which, in turn, is disposed on a remotely activated alignment and has multiple detector elements. A controller governs the orientation of each of the plurality of detector plates based at least on the detector signal generated by its detector elements such that each detector element of each detector module of each detector plate may be aligned to within a specified fraction of the transverse dimension of the fan beam as measured at the exit slot.

Remotely-aligned arcuate detector array for high energy X-ray imaging

A storage and retrieval system is provided for safely and efficiently storing reticles in a clean environment. An enclosed storage unit is provided for storing the reticles, and other items such as wafers and the like, in an environment which minimizes the amount of contaminants and is suitable for use in a semiconductor fabrication clean room. A retrieval unit is provided separate from the enclosed storage unit for accessing and staging the reticles before they enter and leave the storage unit for minimizing exposure of the storage unit. The storage unit includes a movable storage matrix having a plurality of bays for storing the reticles. The movable storage matrix is selectively moved or rotated by a drive mechanism that is located external to the storage unit so that the storage unit is substantially free of contaminant generating components.

Reticle storage and retrieval system

An automated door assembly is provided for sealing an opening in a barrier to a contaminant-free environment suitable for semiconductor wafer processing. The door assembly comprises a base pivotable toward and away from the opening along an arcuate path and a closure plate linearly movably coupled to the base and configured to a seal the opening in the barrier. The closure plate is removable in synchronization with the pivoting of the base to traverse a horizontal linear path into contact with the barrier to close the opening. A vacuum system is provided in conjunction with the door assembly to extract particles from the sealed environment. A sensor disposed on the closure plate is operable to sense the position of wafers or other objects disposed adjacent the opening, to detect misalignment or omission thereof. The closure plate can be provided in a number of sizes for interchangeability to accommodate different sized pods; similarly, bezel inserts having different sized openings therein can be provided in the barrier. A latching apparatus for latching a wafer pod or cassette is also provided. The latching apparatus includes a pod support and a platform linearly movably coupled to the pod support. A locking mechanism configured to mate with a corresponding mechanism on the pod is rotatably mounted to the pod support and coupled to the platform for linear motion therewith, such that linear motion of the platform is operative to rotate the locking mechanism into locking engagement with the pod. The platform includes three beveled pins matable with corresponding openings having beveled surfaces on the pod.

Automated door assembly for use in semiconductor wafer manufacturing

An automated door assembly is provided for sealing an opening in a barrier to a contaminant-free environment suitable for semiconductor wafer processing. The door assembly comprises a base pivotable toward and away from the opening along an arcuate path and a closure plate linearly movably coupled to the base and configured to a seal the opening in the barrier. The closure plate is movable in synchronization with the pivoting of the base to traverse a horizontal linear path into contact with the barrier to close the opening. A vacuum system is provided in conjunction with the door assembly to extract particles from the sealed environment. A sensor disposed on the closure plate is operable to sense the position of wafers or other objects disposed adjacent the opening, to detect misalignment or omission thereof. The closure plate can be provided in a number of sizes for interchangeability to accommodate different sized pods; similarly, bezel inserts having different sized openings therein can be provided in the barrier. A latching apparatus for latching a wafer pod or cassette is also provided. The latching apparatus includes a pod support and a platform linearly movably coupled to the pod support. A locking mechanism configured to mate with a corresponding mechanism on the pod is rotatably mounted to the pod support and coupled to the platform for linear motion therewith, such that linear motion of the platform is operative to rotate the locking mechanism into locking engagement with the pod. The platform includes three beveled pins matable with corresponding openings having beveled surfaces on the pod.

Growing community of inventors

Woburn, MA, United States of America

Jeffrey M Denker