Entegris, Inc.

Ingevity South Carolina, LLC

Jeffrey J Homan

Joseph D Sweeney

Jose I Arno

Cameron I Thomson

Billy-Paul M Holbrook

Robert W Mims

The present description relates to an adsorbent monolith, method to make the adsorbent monolith, and a gaseous storage system that includes an adsorbent monolith according to the present disclosure. In particular, the adsorbent monolith includes adsorbent, a binder, and a scaffold material.

Gaseous storage system, methods for making and using the same

A system () for delivery of dilute fluid, utilizing an active fluid source (), a diluent fluid source (), a fluid flow metering device () for dispensing of one of the active and diluent fluids, a mixer () arranged to mix the active and diluent fluids to form a diluted active fluid mixture, and a monitor () arranged to sense concentration of active fluid and/or diluent fluid in the diluted active fluid mixture, and responsively adjust the fluid flow metering device () to achieve a predetermined concentration of active fluid in the diluted active fluid mixture. A pressure controller () is arranged to control flow of the other of the active and diluent fluids so as to maintain a predetermined pressure of the diluted active fluid mixture dispensed from the system. The fluid dispensed from the system then can be adjustably controlled by a flow rate controller, e.g., a mass flow controller, to provide a desired flow to a fluid-utilizing unit, such as a semiconductor process tool. An end point monitoring assembly is also described, for switching fluid sources () to maintain continuity of delivery of the diluted active fluid mixture.

Apparatus and process for integrated gas blending

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Ladson, SC, United States of America

Jeffrey J Homan