International Business Machines Corporation

Globalfoundries Inc.

Jeffrey J Grimes

Dennis P Hogan

Matthew F Stanton

Kevin C Remillard

A gauge and method of use. The gauge includes a body configured to removeably mount to substrate chuck of a spin apply coating tool, the body rotatable about an axis passing through a center of the chuck; an extendable arm having a first end mounted to the body, the extendable arm having a retracted position and a deployed position, a second end of the arm including an upper finger and a lower finger, the upper finger configured to be positioned above a rim of the coat apply bowl and the lower finger positioned below the rim of the coat apply bowl in the deployed position when the coat apply bowl is mounted in the spin apply tool; and wherein the gauge provides an error indication when the gauge is rotated about the axis and the coat apply bowl is not installed in the spin apply coating tool correctly.

Gauge for installation of liners in substrate spin coating tools

Methods and apparatus for adjusting an alignment of a movable component relative to a substrate holder. An alignment tool is placed on the substrate holder. A nozzle is coupled with the movable component. The movable component and the nozzle are positioned such that a planar surface of the movable component contact a planar surface of the alignment tool, and the nozzle has a non-contacting relationship with the alignment tool. The planar surface of the movable component is leveled to be parallel with the planar surface of the alignment tool.

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South Burlington, VT, United States of America

Jeffrey J Grimes