Agm Container Controls, Inc.

Jeffrey F Vogler

Thomas B Casserly

Andrew Tudhope

Marion D McEuen

A chemical vapor deposition system for coating one or more workpieces is described herein. The deposition system includes a plurality of processing chambers which may be operated independently to increase throughput of the deposition system. Each chamber includes a modular fixture that is configured to maintain the workpieces in a predetermined arrangement which allows for a hollow cathode effect to be maintained in an Interior space of the chamber. The deposition system achieves significantly faster, higher-quality deposition and more complete, conformal coverage.

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Tucson, AZ, United States of America

Jeffrey F Vogler