Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Mattson Technology, Inc (1 from 278 patents)
2. Beijing E-Town Semiconductor Technology, Co., Ltd (1 from 116 patents)
1 patent:
1. 11251026 - Material deposition prevention on a workpiece in a process chamber