Rohm and Haas Electronic Materials Cmp Holdings, Inc.

Jeffrey Benedict

Andrew M Geiger

John Henry Nunley, Jr

A method for pretexturing the polishing surface of a chemical mechanical polishing layer, comprising providing a chemical mechanical polishing layer having a polishing surface; providing a belt sanding machine; feeding the chemical mechanical polishing layer through a gap between a transport belt and a calibrating sanding belt of the belt sanding machine; and, wherein the polishing surface comes into contact with the calibrating sanding belt; wherein the thickness of the polishing layer is reduced.

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Townsend, DE, United States of America

Jeffrey Benedict