University of Michigan

Alliedsignal Inc.

Jeffrey A Squier

Gerard A Mourou

Donald J Harter

Victor M Elner

Xinbing Liu

Peter P Pronko

Ron Kurtz

Detao Du

Paul R Lichter

John S Coe

Subrata K Dutta

In one aspect the invention provides a method for laser induced breakdown of a material with a pulsed laser beam where the material is characterized by a relationship of fluence breakdown threshold (F.sub.th) versus laser beam pulse width (T) that exhibits an abrupt, rapid, and distinct change or at least a clearly detectable and distinct change in slope at a predetermined laser pulse width value. The method comprises generating a beam of laser pulses in which each pulse has a pulse width equal to or less than the predetermined laser pulse width value. The beam is focused to a point at or beneath the surface of a material where laser induced breakdown is desired. The beam may be used in combination with a mask in the beam path. The beam or mask may be moved in the x, y, and Z directions to produce desired features. The technique can produce features smaller than the spot size and Rayleigh range due to enhanced damage threshold accuracy in the short pulse regime.

Method for controlling configuration of laser induced breakdown and

A system for producing ultra-high peak power pulses employs a plurality of solid state amplifying materials, such as Nd:glass, alexandrite, and Ti:sapphire, to achieve stretching of a pulse prior to amplification by a factor of approximately between 100 and 10,000. The time-stretched pulse is amplified by many orders of magnitude, illustratively 10.sup.9. After time-stretching and amplification, the pulse is then recompressed to its original duration. Pumping of the multiple solid-state elements is performed simultaneously using an alexandrite laser which is tunable between approximately 700 and 800 nm. The pumping energy has a pulse duration which is less than the fluorescence lifetime of the excited solid-state media.

Amplification of ultrashort pulses with Nd:glass amplifiers pumped by

Growing community of inventors

Ann Arbor, MI, United States of America

Jeffrey A Squier