University of Michigan

Jeffrey A Horowitz

Stephen R Forrest

David J Bishop

Devices, systems, and techniques are provided for improved OVJP deposition using a shutter disposed within the OVJP print head, between the print head inlet and the nozzle outlets. An OVJP print head as disclosed includes an inlet for organic material entrained in a carrier gas, a micronozzle array outlet, and a shutter disposed in the gas flow path between the inlet and the micronozzle array outlet. The shutter allows for rapid cutoff of carrier gas flow through the print head with extremely low latency.

Pneumatic shutters to control organic vapor jet printing

An organic vapor deposition device comprises a print head, comprising a source channel, in fluid communication with a flow of carrier gas and a quantity of organic source material configured to mix with the carrier gas, a nozzle having a deposition outlet, in fluid communication with the source channel, and a shutter configured at least to open and close the deposition outlet, wherein the print heat is configured to allow the flow of carrier gas and the organic source material exit the deposition outlet when the shutter is in an open position, and to prevent the flow of carrier gas and the organic source material from exiting the deposition outlet when the shutter is in a closed position. A method of manufacturing a device comprising an organic feature on a substrate is also described.

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Ann Arbor, MI, United States of America

Jeffrey A Horowitz