Northeastern University

Tufts College

Physical Sciences, Inc.

Jeffrey A Hopwood

Steven J Davis

David L Pappas

Nicol E McGruer

Richard H Morrison, Jr

Sameer Sonkusale

W Terry Rawlins

Chen Hu Wu

Alan R Hoskinson

Felipe Iza

Kristin Galbally-Kinney

Alan Hoskinson

A laser and methods for providing a continuous wave output beam. The laser and method includes positioning a micro-plasma chip capable of creating micro-plasmas within a resonant cavity. A gas is input into the resonant cavity and flows around the micro-plasma chip. Micro-plasmas ignite and excite the gas to create metastables. The metastables are further excited by an optical pump having an energy sufficient to cause the metastables to lase.

Optically pumped micro-plasma

A microplasma generator includes first and second conductive resonators disposed on a first surface of a dielectric substrate. The first and second conductive resonators are arranged in line with one another with a gap defined between a first end of each resonator. A ground plane is disposed on a second surface of the dielectric substrate and a second end of each of the first and second resonators is coupled to the ground plane. A power input connector is coupled to the first resonator at a first predetermined distance from the second end chosen as a function of the impedance of the first conductive resonator. A microplasma generating array includes a number of resonators in a dielectric material substrate with one end of each resonator coupled to ground. A micro-plasma is generated at the non-grounded end of each resonator. The substrate includes a ground electrode and the microplasmas are generated between the non-grounded end of the resonator and the ground electrode. The coupling of each resonator to ground may be made through controlled switches in order to turn each resonator off or on and therefore control where and when a microplasma will be created in the array.

Microplasma generating array

A low-temperature, atmospheric-pressure microplasma generator comprises at least one strip of metal on a dielectric substrate. A first end of the strip is connected to a ground plane and the second end of the strip is adjacent to a grounded electrode, with a gap being defined between the second end of the strip and the grounded electrode. High frequency power is supplied to the strip. The frequency is selected so that the length of the strip is an odd integer multiple of &#xbc; of the wavelength traveling on the strip. A microplasma forms in the gap between the second end of the strip and the grounded electrode due to electric fields in that region. A microplasma generator array comprises a plurality of strongly-coupled resonant strips in close proximity to one another. At least one of the strips has an input for high-frequency electrical power. The remaining strips resonate due to coupling from the at least one powered strip. The array can provide a continuous line or ring of plasma. The microplasma generator can be used to alter the surface of a substrate, such as by adding material (deposition), removal of material (etching), or modifying surface chemistry.

Microplasma generator and methods therefor

A system and method employing a microplasma to electrically charge nano- or micro-particles in a gas phase and, subsequently, trap the charged particles within the microplasma using the microplasma's built-in electric fields are disclosed. Confinement of the particles allows their density to be increased over time such that very low concentrations of particles can be detected, e.g., by methods such as laser scattering and/or detection of the plasma-induced charge on the particles. Preferably, charge detection methods are employed when nano-particles are to be trapped and detected.

Nano-particle trap using a microplasma

Processes for preparing contacts on microswitches have been invented. The first is a wet process, involving the use of one or more acids, bases and peroxides, in some formulations diluted in water, to flush the contacts. The second process involves exposing the contacts to plasmas of various gases, including (1) oxygen, (2) a mixture of carbon tetrafluoride and oxygen, or (3) argon.

Method of preparing electrical contacts used in switches

A low power plasma generator is provided which can be fabricated in micro-miniature size and which is capable of efficient portable operation. The plasma generator comprises a microwave stripline high Q resonant ring, which may be circular or non-circular, disposed on a dielectric substrate and having a discharge gap in the plane of the substrate. The resonant ring is one-half wavelength in circumference at the operating frequency and is matched to the impedance of the microwave power supply. The voltages at the resonator ends at the gap are 180&#xb0; out of phase and create an intense electric field in the gap, and a resultant discharge across the gap. The discharge is non-thermal and operates near room temperature and has an intense optical emission. The generator is well suited for low power portable and other applications and can be readily fabricated by known microcircuit techniques. Alternatively, the gap of the resonant ring can extend through the substrate and in which the discharge is formed. A bias coil can be coupled to the ring to provide a bias voltage to the plasma. A feedback path can be provided for self oscillation and closed loop frequency control.

Low power plasma generator

A method of creating a diamond-like carbon film on a substrate, including the steps of exposing the substrate to a hydrocarbon gas environment and generating plasma in the environment of an electron density greater than approximately 5.times.10.sup.10 per cm.sup.3 and a sheath thickness less than about 2 mm under conditions of high ion flux and controlled, low energy ion bombardment.

Method of coating edges with diamond-like carbon

A monolithic inductively coupled plasma generator includes a first substrate having an electrical circuit disposed thereon which includes a substantially planar inductive coil, a capacitor electrically coupled in series with the coil, and a drive circuit electrically coupled to the coil for driving the circuit at resonance. The plasma generator further includes a plasma chamber proximate the coil in which a gas is excited. In accordance with the invention, a method of fabricating an inductively coupled plasma generator includes the steps of providing a first substrate, depositing at least one layer of conductive material on the first substrate, patterning and etching the at least one layer of conductive material to form an electrical circuit including a coil and a capacitor, providing a plasma chamber proximate the electrical circuit, providing a gas to the plasma chamber, and connecting an oscillator to the electrical circuit for providing radio frequency energy to the electrical circuit wherein the gas is excited into a plasma.

Growing community of inventors

Needham, MA, United States of America

Jeffrey A Hopwood