Umachines, Inc.

Jeff Dickson

Yu-Chong Tai

Fukang Jiang

Aramais Avakian

Tom Tsao

Chen-Wei Chiu

An apparatus at least partially intercepts a plurality of light beams propagating along a respective plurality of beam paths. The apparatus includes a single crystal silicon substrate and an array including a plurality of modules. Each module includes a reflector comprising single crystal silicon and a reflector surface lying in a reflector plane substantially perpendicular to the substrate surface. Each module further includes a reflector support which mounts the reflector to move substantially within the reflector plane with a displacement component along the surface normal direction of the substrate surface. Each module further includes a reflector driver responsive to electrical current to selectively move the reflector between a first position and a second position.

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Pasadena, CA, United States of America

Jeff Dickson