Applied Materials, Inc.

Jeevan Prakash Sequeira

Suhail Anwar

Carl A Sorensen

Jozef Kudela

Yui Lun Wu

Embodiments described herein provide a lid assembly of a chamber for independent control of plasma density and gas distribution within the interior volume of the chamber. The lid assembly includes a plasma generation system and a gas distribution assembly. The plasma generation system includes a plurality of dielectric plates having a bottom surface oriented with respect to vacuum pressure and a top surface operable to be oriented with respect to atmospheric pressure. One or more coils are positioned on or over the plurality of dielectric plates. The gas distribution assembly includes a first diffuser and a second diffuser. The first diffuser includes a plurality of first channels intersecting a plurality of second channels of the second diffuser.

Growing community of inventors

Milpitas, CA, United States of America

Jeevan Prakash Sequeira