Samsung Electronics Co., Ltd.

Jeehon Han

Sunil Shim

Wonseok Cho

Hyojoon Ryu

Seogoo Kang

Kwanyong Kim

A semiconductor device includes; a memory stack disposed on a substrate and including a lower gate electrode, an upper gate stack including a string selection line, a vertically extending memory gate contact disposed on the lower gate electrode, and a vertically extending selection line stud disposed on the string selection line. The string selection line includes a material different from that of the lower gate electrode, and the selection line stud includes a material different from that of the memory gate contact.

Growing community of inventors

Hwaseong-si, South Korea

Jeehon Han