Samsung Electronics Co., Ltd.

Jee Eun Jung

Hee-jun Lee

Heung Suk Oh

An optical proximity correction system and an operating method are provided. Provided is an optical proximity correction system comprising, a plurality of patch blocks which include a plurality of patches including a segment information table, a plurality of slave devices which receive the segment information table from the plurality of patch blocks to generate a minimum patch table, and a master device which receives the minimum patch table from the plurality of slave devices, generates a segment average calculation table, and performs an optical proximity correction on the patches recorded in the segment average calculation table.

Growing community of inventors

Yongin-si, South Korea

Jee Eun Jung