International Business Machines Corporation

Jean Pierre Locquet

Johannes Georg Bednorz

Carl A Mueller

Erich Maechler

Andrei Catana

Described is a process for manufacturing thin films by periodically depositing (DEP) a number of block layers consisting of different base materials on a substrate (multilayer deposition), wherein the thickness of the layers (LT) is restricted to one to 20 monolayers and deposition as well as crystallization of the thin film is completed at approximately constant temperature without performing a separate annealing step. The method can be used to produce thin films of high-T.sub.c -superconductors. It allows a better control of the crystal growth of ternary or higher compounds with comparatively large unit cells.

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Kilchberg, Switzerland

Jean Pierre Locquet