Csem Centre Suisse D'electronique Et De Microtechnique Sa

Csem-centre Suisse D'electronique Et De Microtechnique

Jean-Marc Moret

Raymond Vuilleumier

Philippe Renaud

Johan Wilhelm Bergqvist

Felix Rudolf

An integrated capacitive transducer (1) which includes a membrane having a movable part (4) with an electrode, a fixed plate (6) with a counter-electrode (8), and an electrode and counter-electrode support structure (10). The fixed plate (6) also has an electret (30) which is disposed facing the movable part (4), is separated from the membrane by an open space (16), and has a first electrically conductive layer (32) embedded in an insulating material (34, 36). The invention has particular applications in hearing aids.

Integrated capacitive transducer

The obturators can be actuated in order to modulate an incident beam (L). Microshutters (5) are attached to a substrate by means of fastenings opposing resistance to their rotation away from a rest position. The microshutters (5) are placed on optical paths (X--X) so as to be able to interrupt them or establish them. They are fitted out with reflecting surfaces (7) so as to deflect the light when they are in the blocking position. On each optical path (X--X) a supplementary reflecting surface (8), a diaphragm (6) and a focusing means (4) are placed. Thus, in line with its position, each microshutter can focus the light on the diaphragm (6) so as to allow it to pass or to deflect it in order to block it. The application thereof is in the transformation of a beam (L) into a modulated beam (Lm).

Miniature network of light obturators

The invention concerns a fabrication process of at least one generally elated structural element (14) on a substrate (12) in a first material and having a substantially flat upper face (13), said element (14) realized in a second material comprising at least a first wing (14a) parallel to a plan perpendicular to said upper face (13).

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Cortaillod, Switzerland

Jean-Marc Moret