Asulab S.a.

Jean-Luc Simon

Rudolf Dinger

Etienne Bornand

A reed contactor includes a base plane comprising two distinct conducting zones. Two shafts of the contactor have the form of blades, each of which engages a base plane at the level of one of the conducting zones. One of the beams at least is supported on the base plane by means of a foot on which it is mounted in an overhanging manner. The contactor is formed by process comprising the steps of forming successively on a substrate an alternance of levels of photoresist and of metallization. At each step, the level of upper photoresist is configured to create in its thickness free growth spaces in which metal pins are formed by galvanic growth. The levels of photoresist situated under the last level of metallization play the role of sacrificial layers and allow the formation of suspended metallic structures.

Reed contactor and process of fabricating suspended tridimensional

The invention concerns a microelectronic device having body (42) and abutment device (46, 47, 48) projecting from one face of the body (42) for abutment of the microelectronic device to a support member (62), the body (42) including an electrically active region (41) with a sensitive axis (51), characterised in that the abutment device (46, 47, 48) has a predetermined relationship with the sensitive axis (51) to thereby enable alignment of the sensitive axis (51) with an expected signal axis.

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Neuchatel, Switzerland

Jean-Luc Simon