L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des

Jean-Luc Labat

Lahcen Ougarane

Michel Gastiger

The microwave torch comprises at least one gas supply conduit (1, 2); a resonant cavity (3) forming around the conduit a sleeve open adjacent to the outlet of the conduit and including a lateral opening (4); a transition coaxial structure perpendicular to the sleeve comprising, on one hand, an outer tube (5) connected to the lateral opening (4) of the sleeve and, on the other hand, an inner element (6) having one end (20) in contact with the conduit and an opposite end which is in contact with the outer surface of a wave guide (8) and carries a transition member (7) disposed in the wave guide; said wave guide supplying microwave energy and having a rectangular section and perpendicular to the coaxial structure (5, 6) being provided with an opening (27) where the outer tube (5) of the coaxial structure is connected; shielding gas supply means in the wave guide and/or the coaxial structure and/or the sleeve; optionally tuning means; and optionally plasma igniting means.

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Ibaraki, Japan

Jean-Luc Labat