Applied Materials, Inc.

Jean Lu

Nag B Patibandla

Xianmin Tang

Mingwei Zhu

Yong Cao

Zhebo Chen

Daniel Lee Diehl

Zihao Yang

Shumao Zhang

Embodiments described herein include a method for depositing a material layer on a substrate while controlling a bow of the substrate and a surface roughness of the material layer. A bias applied to the substrate while the material layer is deposited is adjusted to control the bow of the substrate. A bombardment process is performed on the material layer to improve the surface roughness of the material layer. The bias and bombardment process improve a uniformity of the material layer and reduce an occurrence of the material layer cracking due to the bow of the substrate.

Method for depositing high quality PVD films

Growing community of inventors

Palo Alto, CA, United States of America

Jean Lu