Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Commissariat a L'energie Atomique

Ulis

Centre National De La Recherche Scientifique

Office Nathional D'etudes Et De Recherches Aerospatiales—onera—chemie De La Huniere

Office National D'etudes Et De Recherches Aerospatiales

Lynred

Jean-Jacques Yon

Geoffroy Dumont

Stephane Pocas

Michel Vilain

Pierre Imperinetti

Laurent Carle

Salim Boutami

Jean-Louis Ouvrier-Buffet

Laurent Frey

Denis Pelenc

Patrick Leduc

Sébastien Cortial

Astrid Astier

Abdelkader Aliane

Jean-Luc Pelouard

Fabrice Pardo

Riad Haidar

Agnès Arnaud

Patrick Bouchon

Jerome Hazart

Patrick Robert

Sébastien Becker

Alexandre Mary

Wilfried Rabaud

Jérôme Favier

Jérôme Hazart

Joël Deschamps

Stéphane Pocas

Stéphane Collin

Antoine Albouy

Thomas Perrillat-Bottonet

Fabien Eloi

Emmanuel Bercier

Charlie Koechlin

Jérome Hazart

Etienne Fuxa

A thermal detector with a suspended absorbent membrane, which has at least two absorbers. The second absorber is designed to absorb the electromagnetic radiation in a spectral sub-band of a predefined spectral band, centered on a wavelength λ. Moreover, it is spaced from a reflector by a value equal to λ/4nso as to form therewith a quarter-wave cavity for the wavelength λ, the spectral sub-band being centered on the wavelength λwhich is equal to λ/2 within plus or minus 2 μm. Furthermore, the first and second absorbers have total surface areas such that a surface area ratio is between 0.5 and 3.

Broadband thermal detector with a plurality of quarter-wave cavities

A process for fabricating a detecting device includes producing a getter pad based on amorphous carbon resting on a mineral sacrificial layer that covers a thermal detector and producing a thin encapsulating layer that rests on the mineral sacrificial layer and that covers an upper face and sidewalls of the getter pad. The mineral sacrificial layer is removed via a first chemical etch, and a protective segment of the getter pad is removed via a second chemical etch.

Process for fabricating a detecting device the getter of which is better protected

A process for fabricating a microbolometer includes producing a membrane containing a thermistor material, which is made of a first compound based on vanadium oxide and which is formed from a central segment. The central segment covers an intermediate insulating layer, and the thermistor material is formed from lateral segments, which make contact with biasing electrodes through apertures. The process also includes incorporating locally, by ion implantation, into the lateral segments an amount of an additional chemical element higher than or equal to the effective amount. The electrical resistivity ρL at room temperature of the compound thus modified is lower than or equal to 10% of the electrical resistivity ρc at room temperature of the first compound.

Method for manufacturing a microbolometer with thermistor material made from vanadium oxide having improved performances

A component for detecting electromagnetic radiation includes a detection structure and a supply circuit for the detection structure. The detection structure includes a transistor associated with an absorbent element for detecting the rise in temperature of the absorbent element when electromagnetic radiation is absorbed. The supply circuit is configured to supply the detection structure in operation such that a channel zone of the structure has, at the location of one of its first and the second faces, a layer having carriers of a second type of conductivity opposite to a first type of conductivity of a source zone and of a drain zone of the transistor, the layer being referred to as blocking layer.

High-sensitivity electromagnetic radiation detection component and method for manufacturing such a component

A process for fabricating a device for detecting electromagnetic radiation, including an encapsulation structure including an encapsulation layer on which a relief rests, and a sealing layer, which has a local breakage in continuity at the relief.

Process for fabricating a device for detecting electromagnetic radiation having an improved encapsulation structure

A radiation sensor including a plurality of pixels formed in and on a semiconductor substrate, each pixel including a microboard suspended above the substrate by thermal insulation arms, the microboard including: a conversion element for converting incident electromagnetic radiation into thermal energy; and a passive optical shutter including a heat-sensitive layer covering one of the faces of the conversion element, the heat-sensitive layer having a reflection coefficient for the radiation to be detected that increases as a function of its temperature.

Radiation sensor with anti-glare protection

A device for detecting electromagnetic radiation includes at least one thermal detector, placed on a substrate; an encapsulating structure forming a cavity housing the thermal detector, including at least one thin encapsulating layer; and at least one Fabry-Perot interference filter, formed by first and second semi-reflective mirrors that are separated from each other by a structured layer. A high-index layer of one of the semi-reflective mirrors is at least partially formed from the thin encapsulating layer.

Device for detecting electromagnetic radiation having an encapsulating structure including at least one interference filter

A method for producing a bolometric detector comprising producing a stack, on an interconnect level of a read-out circuit, comprising a sacrificial layer positioned between a carrier layer and an etch stop layer, the sacrificial layer comprising a mineral material; producing a conducting via passing through the stack such that it is in contact with a conducting portion of said interconnect level; depositing a conducting layer onto the carrier layer and the via; etching the conducting layer and the carrier layer, forming a bolometer membrane electrically connected to the via by a remaining portion of the conducting layer that covers an upper part of the via; and elimination of the sacrificial layer by selective chemical etching, and such that the membrane is suspended by the via.

Method for producing a bolometric detector

A bolometer type detection structure for detecting electromagnetic radiation is provided, including a MOSFET transistor associated with a first absorbing element in order to detect an increase in temperature of the first absorbing element during absorption of the electromagnetic radiation, the transistor including at least one first and at least one second zones, at least one third zone separating the first and second zones from each other, and at least one first gate electrode arranged to bias the third zone, the first gate electrode including at least one first metal portion forming the first absorbing element, the first metal portion having a thickness Esatisfying: where &#x3c1; is a resistivity of a metal material forming the at least one first metal portion. A process for manufacturing the structure is also provided.

Structure for detecting electromagnetic radiation of the bolometer type and method for manufacturing such a structure

An electromagnetic radiation detector comprising: at least one membrane suspended above a substrate; and a cap, closing a hermetic cavity including the at least one membrane. According to the invention: the thickness of the cap is less than or equal to 10 &#x3bc;m; the cap bears at least on support walls surrounding the membrane(s); and the detector has first and second metallic sealing layers intercalated on each other between the cap and the support walls, and between which a peripheral bonding zone extends. The invention also relates to a method of making such a detector. The invention provides an encapsulation solution using a thin cap, in which the membranes are not subjected to high temperatures.

Electromagnetic radiation detector encapsulated by transfer of thin layer

A device for detecting electromagnetic radiation, including a readout circuit, which is located in a substrate, and an electrical connection pad, which is placed on the substrate, including a metal section that is raised above the substrate and electrically connected to the readout circuit. The detection device furthermore includes a protection wall that extends under the raised metal section so as to define therewith at least one portion of a cavity, and what is called a reinforcing layer section that is located in the cavity and on which the raised metal section rests.

Device for detecting electromagnetic radiation comprising a raised electrical connection pad

A device for detecting electromagnetic radiation is provided, including a substrate; a matrix of thermal detectors disposed on the substrate; and a structure encapsulating the matrix of thermal detectors, including an encapsulating layer extending continuously around and above the matrix of thermal detectors so as to define with the substrate a cavity in which the matrix of thermal detectors is disposed, the encapsulating layer including at least one internal bearing section, which bears directly against the substrate between two adjacent thermal detectors of said matrix, said at least one internal bearing section including a sidewall and a peripheral wall, the sidewall being separate from the peripheral wall in a plane parallel to a plane of the substrate, and the peripheral wall encircling the matrix of thermal detectors.

Device for detecting radiation including an encapsulating structure having an improved mechanical strength

A method of manufacturing a detector capable of detecting a wavelength range [&#x3bb;; &#x3bb;] centered on a wavelength &#x3bb;, including: forming said device on a substrate by depositing a sacrificial layer totally embedding said device; forming, on the sacrificial layer, a cap including first, second, and third optical structures transparent in said range [&#x394;; &#x3bb;], the second and third optical structures having equivalent refraction indexes at wavelength &#x3bb;respectively greater than or equal to 3.4 and smaller than or equal to 2.3; forming a vent of access to the sacrificial layer through a portion of the cap, and then applying, through the vent, an etching to totally remove the sacrificial layer.

Method of manufacturing an infrared detector having a micro-cavity and a low refraction index step at an interface with a transparent cap, and associated infrared detector

A method makes an electromagnetic radiation detecting device including at least one thermal detector with an absorbent membrane suspended above a substrate, intended to be located in a sealed cavity. The method includes depositing, on the substrate, a gettering metallic layer including a metallic material with a gettering effect; depositing a carbonaceous sacrificial layer of amorphous carbon on the gettering metallic layer; depositing at least one sacrificial mineral layer on the carbonaceous sacrificial layer; chemical-mechanical planarization of the sacrificial mineral layer; fabricating the thermal detector so that the absorbent membrane is produced on the sacrificial mineral layer; removing the sacrificial mineral layer; and removing the carbonaceous sacrificial layer.

Method for making a device for detecting electromagnetic radiation comprising a layer of getter material

A device for detecting electromagnetic radiation, including a substrate; at least one thermal detector, placed on the substrate, including an absorbing membrane suspended above the substrate; and an encapsulating structure encapsulating the thermal detector, including an encapsulating layer extending around and above the thermal detector so as to define with the substrate a cavity in which the thermal detector is located; wherein the encapsulating layer includes at least one through-orifice that is what is referred to as an exhaust vent, each exhaust vent being placed so that at least one thermal detector has a single exhaust vent located facing the corresponding absorbing membrane, preferably plumb with the center of said absorbing membrane.

Growing community of inventors

Sassenage, France

Jean-Jacques Yon