Ateliers Busch Sa

Adixen Vacuum Products

Alcatel Lucent

Pfeiffer Vacuum Gmbh

Jean-Eric Larcher

Théodore Iltchev

Didier Müller

Didier Muller

Theodore Iltchev

Cyrille Nomine

Laurent Ducimetiere

Paul Alers

Frédéric Rouveyre

Jeihong Kim

Paul Cuttaz

The present invention relates to a redundant vacuum pumping system () and a pumping method using this system, comprising a primary roots pump (), a first pumping sub-system () and a second pumping sub-system (), wherein the first pumping sub-system () and the second pumping sub-system () are arranged to pump in parallel the gas evacuated by the primary roots pump (), the first pumping sub-system () comprising a first secondary roots pump () and a first positive displacement pump () and a first valve () positioned between the gas discharge outlet () of the primary roots pump () and the gas suction inlet () of the first secondary roots pump (), and the second pumping sub-system () comprising a second secondary roots pump () and a second positive displacement pump () and a second valve () positioned between the gas discharge outlet () of the primary roots pump () and the gas suction inlet () of the second secondary roots pump (). According to the invention, the first pumping sub-system () and the second pumping sub-system () are configured to pump at a same flow rate, and the primary roots pump () is configured to be able to pump at a flow rate F equal to the pumping flow rate of the primary pumping sub-system () plus the pumping flow rate of the secondary pumping sub-system ().

Redundant pumping system and pumping method by means of this pumping system

A pumping method in a pumping system comprises: a main vacuum pump with a gas inlet port connected to a vacuum chamber and a gas outlet port leading into a conduit before coming out into the gas outlet of the pumping system, a non-return valve positioned in the conduit between the gas outlet port and the gas outlet, and an auxiliary vacuum pump connected in parallel to the non-return valve. The main vacuum pump is activated in order to pump the gases contained in the vacuum chamber through the gas outlet port, simultaneously the auxiliary vacuum pump is activated and continues to operate all the while that the main vacuum pump pumps the gases contained in the vacuum chamber and/or all the while that the main vacuum pump maintains a defined pressure in the vacuum chamber. Also included is a pumping system.

Method of pumping in a system of vacuum pumps and system of vacuum pumps

The present invention relates to a pumping system to generate a vacuum (SP), comprising a main vacuum pump which is a claw pump () having a gas suction inlet () connected to a vacuum chamber () and a gas discharge outlet () leading into a gas evacuation conduit () in the direction of a gas exhaust outlet () outside the pumping system. The pumping system comprises a non-return valve () positioned between the gas discharge outlet () and the gas exhaust outlet (), and an auxiliary vacuum pump () connected in parallel to the non-return valve. In a pumping method by means of this pumping system (SP), the main vacuum pump () is started up in order to pump the gases contained in the vacuum chamber () and to discharge these gases through its gas discharge outlet (), simultaneously to which the auxiliary vacuum pump () is started up. Moreover the auxiliary vacuum pump () continues to pump all the while that the main vacuum pump () pumps the gases contained in the vacuum chamber () and/or all the while that the main vacuum pump () maintains a defined pressure in the vacuum chamber ().

Pumping system for generating a vacuum and method for pumping by means of this pumping system

The present invention relates to a pumping method in a pumping system (SP, SPP) comprising: a main lubricated rotary vane vacuum pump () with a gas inlet port () connected to a vacuum chamber () and a gas outlet port () leading into a conduit () before coming out into the gas outlet () of the pumping system (SP, SPP), a non-return valve () positioned in the conduit () between the gas outlet port () and the gas outlet (), and an auxiliary lubricated rotary vane vacuum pump () connected in parallel to the non-return valve (). According to this method, the main lubricated rotary vane vacuum pump () is activated in order to pump the gases contained in the vacuum chamber () through the gas outlet port (), simultaneously the auxiliary lubricated rotary vane vacuum pump () is activated and continues to operate all the while that the main lubricated rotary vane vacuum pump () pumps the gases contained in the vacuum chamber () and/or all the while that the main lubricated rotary vane vacuum pump () maintains a defined pressure in the vacuum chamber (). The present invention also relates to a pumping system (SP, SPP) able to be used to implement this method.

The present invention relates to a pumping method in a pumping system (SP) comprising: a primary dry screw-type vacuum pump () with a gas entry orifice () connected to a vacuum chamber () and a gas exit orifice () leading into a conduit () before coming out into the gas outlet () of the pumping system (SP), a non-return valve () positioned in the conduit () between the gas exit orifice () and the gas outlet (), and an ejector () connected in parallel to the non-return valve (). According to this method, the primary dry screw-type vacuum pump () is put into operation in order to pump the gases contained in the vacuum chamber () through the gas exit orifice (); in a simultaneous way, the ejector () is fed with working fluid, and the ejector () continues to be fed with working fluid all the time that the primary dry screw-type vacuum pump () pumps the gases contained in the vacuum chamber () and/or all the time that the primary dry screw-type vacuum pump () maintains a defined pressure in the vacuum chamber (). The present invention also relates to a pumping system (SP) able to be used for implementing this method.

Pumping method in a system of vacuum pumps and system of vacuum pumps

An ionization cell for a mass spectrometer () includes: an ionization housing () having a first and a second electron input groove () and one side () of which has an output groove () for passing ionized particles () therethrough, a first working filament () placed opposite the first electron input groove () and intended to be supplied to produce an electron beam (), and a second backup filament () placed opposite the second electron input groove () and intended to be supplied in the event the first working filament () fails so as to produce the electron beam, the input groove () being placed outside a front region (F) located opposite the first input groove (). The invention also relates to a leak detector with a mass spectrometer, which includes such an above-described ionization cell.

Growing community of inventors

Delle, France

Jean-Eric Larcher