Bertin & Cie

Etat Fracais

Etat Francais (centre National D'etudes Des Telecommunication)

Jean-Claude Georgel

Geoffroy Auvert

Jocelyn Millet

Yves Guerin

Yves Guern

Apparatus for determining the three-dimensional shape of an object

The machine of the invention comprises a sealed enclosure (10) in which a microscope objective lens (34) is fixed and receives a laser beam (36) via a thick transparent window (38), the enclosure also containing a reaction chamber (20) constituted by a sealed box having a lid which constitutes a thin transparent window (56) beneath which the thin film object (32) to be treated is placed. Means (72, 80, 74) serve to evacuate the enclosure (10) and the reaction chamber (20) and to convey reactive gas into the reaction chamber. The invention is particularly applicable to treating electronic circuits, hybrid circuits, etc.

Laser microbeam machine for acting on thin film objects, in particular

A microbeam laser machine for operating on objects having thin layers comprises a platen (14) which is rigid and undeformable and which has optical components mounted thereon defining a laser beam transmission path (34, 36, 38, 46), an illumination path (54, 55, 46), and an observation path (70, 74, 76). The invention is intended, in particular, for microoperations on integrated circuits and other objects having thin layers.

Microbeam laser machine for acting on objects having thin layers of

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Lambesc, France

Jean-Claude Georgel