L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des

Jean-Claude Boissin

Pierre Briend

Frederic Castellanet

In order to deliver ultrapure helium to a utilization line (1), helium is withdrawn, in liquid or supercritical form, from a storage tank (3), it is filtered in this liquid or supercritical form (at 4), the filtered helium is vaporized and the resulting helium gas is sent to the utilization line (1). The process is applicable to the cooling of integrated-circuit wafers.

Process and installation for delivering ultra-pure helium

Transfer line for cryogenic fluid comprising a transfer conduit (1) for cryogenic fluid and a conduit (3) for cooling fluid surrounded by a metallic shield (4) coupled thermally to the cooling conduit (3). The metal shield (4) is a thin strip wound in unsecured manner about the conduits (1, 3) and locally connected to the cooling conduit (3) by resilient clips (5) or by a layer (6) of connecting material. The metallic strip has a thickness no greater than 0.1 mm and can be of aluminum.

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Saint Ismier, France

Jean-Claude Boissin