L'air Liquide, Soci&#xe9;t&#xe9; Anonyme Pour L'etude Et L'exploitation Des Proc&#xe9;d&#xe9;s Georges Claude

L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des

L'air Liquide, Societe Anonyme a Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude

Other

American Air Liquide, Inc.

Jean-Christophe Rostaing

Michel Moisan

Francois Coeuret

Roxane Etemadi

Bernard Drevillon

Daniel Guerin

Francis Bryselbout

Fran&ccedil;ois Coeuret

Zenon Zakrzewski

Jean-Claude Parent

Claude De Saint Etienne

Jean-Marc Girard

Daniel Gary

Christian Larquet

Claude Doche

Francedillaois Coeuret

Philippe Spinelli

Nicolas Bertrand

Thibaut Heitz

Danielle Keroack

Pierre Meyers

Jean-Marie Friedt

Zakrzewski Zenon

Pierre-Emmanuel Meyers

Sylvain Scotto D'Apolinia

Rajat Agrawal

Mariusz Jasinski

Dariusz Czylkowski

The present invention relates to a method for treating plastic bottles comprising an operation for cold plasma sterilization with non-germicidal gasses and/or an operation for the cold plasma deposition of a diffusion barrier layer, said method being characterized in that said cold plasma delivers adjustable nonthermal energy to the entire inside surface of the bottle, said cold plasma being generated either through a distributed propagation of microwaves having a maximum intensity in the vicinity of said surface or by a hollow cathode system adapted to the bottle and supplied with pulsed DC and/or RF voltage. The invention also relates to the devices for implementing the method.

Method for cold plasma treatment of plastic bottles and device for Implementing Same

A method for sanitation and preservation of foodstuffs includes the following steps. A container containing a foodstuff is provided. A non-thermal plasma is introduced to an interior of the container. The container is sealed.

System and method for non-thermal plasma treatment of foodstuffs

The invention relates to a microwave plasma exciter device which includes a waveguide () for concentrating the microwaves; and a plasma generator () for forming a plasma, which are disposed in a microwave concentration zone.

Microwave plasma exciters

Provided is a device for the microwave-sustained plasma treatment of gases, which comprises a hollow structure forming a waveguide intended to be connected to a microwave generator, and means for making the gas to be treated flow through the said structure in a region in which the amplitude of the electric field associated with the incident wave is high. The means for making the gas flow comprise a plasma torch for producing a plasma in the gas. The torch comprises an injector made of an electrically conducting material mounted on a first large face of the said structure and extending so as to project through an orifice made in a second large face opposite the said first large face. A gap for passage of the incident waves lies around the injector.

Device for the plasma treatment of gases

Method for real-time control of the fabrication of a thin-film structure comprising a substrate by ellipsometric measurement in which:

Method for real-time control of the fabrication of a thin-film structure by ellipsometric measurement

In this method for the surface treatment of a metal part ( ) for the purpose of deoxidizing it and/or cleaning it, a sealed chamber ( ), in which the part to be treated is placed, is filled with a low-pressure reducing gas mixture, a static magnetic field is created in a region of the chamber ( ) separate from the region in which the part ( ) to be treated is placed and the gas mixture is excited by means of an electromagnetic wave injected into the chamber ( ) so as to generate a treatment plasma in the gas, the intensity of the static magnetic field corresponding to electron cyclotron resonance established in the chamber in a distributed manner.

Method and installation for treating a metal part surface

A section of pipe, for a device for treating a gas by exciting the latter by way of incident microwave radiation suitable for producing a surface-wave plasma in the gas, including a discharge tube made of dielectric material intended to pass through the device in a region for concentrating the incident radiation. The tube comprises, over at least part of its length, a double wall.

Section of pipe for a gas treatment device and device incorporating such a section of pipe

Provided is a novel method of and system for recovering and recirculating a deuterium-containing gas. According to the inventive method, a deuterium-containing feed gas is introduced into a chamber. An exhaust gas containing deuterium is removed from the chamber. The deuterium concentration of the exhaust gas is adjusted to a predetermined value, thereby producing a concentration-adjusted gas stream. Finally, the concentration-adjusted gas stream is introduced into the chamber as the deuterium-containing feed gas. The invention makes the use of deuterium, for example, in the mass production of semiconductor devices, commercially feasible.

Method and system for recovering and recirculating a deuterium-containing gas

The invention concerns a device for exciting a gas comprising a hollow structure (,) forming a waveguide to be connected to a microwave generator and means for circulating a gas through the structure. The gas circulating means comprise an assembly of at least two hollow tubes (,) made of dielectric material respectively passing through said structure (,) in the zones wherein the amplitude of the electric field associated with the incident wave is substantially the same.

Device for exciting a gas by a surface wave plasma

An apparatus for the treatment of perfluorinated and/or hydrofluorocarbon gases, for the purpose of destroying them, is provided. The apparatus includes at least one high-frequency surface-wave exciter which produces surface waves, a waveguide designed to guide the surface waves produced by the at least one wave exciter to at least one hollow dielectric tube for (i) creating, when supplied with a carrier gas an atmospheric-pressure plasma and (ii) for dissociating the molecules of the perfluorinated and/or hydrofluorocarbon gases within the plasma in order to form reactive compounds, and at least one treatment unit for the reactive fluorinated compounds which is arranged on an exit side of a corresponding hollow dielectric tube.

Process and apparatus for the treatment of perfluorinated and hydrofluorocarbon gases for the purpose of destroying them

Device for exciting a gas comprising a hollow structure forming a waveguide, made of an electrically conductive material, connected to a microwave generator and including a passage for a hollow dielectric tube adapted for flow of the gas to be excited, the hollow structure further including a wave-concentrating region designed to concentrate microwave radiation produced by the generator onto the tube, during operation of the device, for the purpose of producing a surface wave plasma in the gas, at least one electromagnetic screening sleeve made of a conductive material, fastened to the hollow structure and extending along the extension of the passage so as to surround the hollow tube.

Device for exciting a gas by a surface wave plasma and gas treatment apparatus incorporating such a device

The invention relates to a storage box for an object that is to be protected from physicochemical contamination. The storage box is intended to have low weight, good mechanical strength, a good electrical condition, with a low degassing rate in time with prevention of diffusion of gasses from the external atmosphere into the interior of the box. The inner and/or outer surface of the box's walls are coated with at least one protective layer. The box may be used to store silicon wafers.

Storage box for an object to be protected against physicochemical contamination

Provided are a process and apparatus for purifying a gas. In accordance with the process, the gas to be purified flows through a hollow dielectric tube. An electric field is created in the gas to be purified by a traveling electromagnetic wave which travels in the dielectric tube and creates, in the gas, an atmospheric-pressure plasma which is not in local thermodynamic equilibrium, for the purpose of dissociating impurities in the gas to form reactive compounds. The formed reactive compounds are reacted with a corresponding reactive material for eliminating the reactive compounds from the gas to be purified.

Process for purifying a gas and apparatus for the implementation of such a process

Provided is a process for purfying a gas. In the process, the gas to be purified flows through a hollow dielectric tube. An electric field in the gas to be purified is created by a traveling electromagnetic wave which travels in the dielectric tube and is suitable for creating, in the gas, an atmospheric-pressure plasma which is not in local thermodynamic equilibrium, for the purpose of dissociating impurities in the gas in order to form reactive compounds. The formed reactive compounds are reacted with a corresponding reactive material for eliminating the reactive compounds from the gas to be purified.

Process for purifying a gas and apparatus for the implementation of such

A process for treating perfluorinated and/or hydrofluorocarbon gases, comprising the steps of

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Versailles, France

Jean-Christophe Rostaing