Average Co-Inventor Count = 4.00
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Unaxis-balzers Aktiengesellschaft (2 from 78 patents)
2. Tel Solar Ag (1 from 24 patents)
3 patents:
1. 9045828 - RF plasma reactor having a distribution chamber with at least one grid
2. 7306829 - RF plasma reactor having a distribution chamber with at least one grid
3. 6502530 - Design of gas injection for the electrode in a capacitively coupled RF plasma reactor