Samsung Electronics Co., Ltd.

Semes Co., Ltd.

Jea-Muk Oh

Youngchul Lee

Nam-Hong Lee

JinHwan Lee

Kyungsook Lee

Semin Kwon

Jongpil Park

Byoungjun Min

Sangil Kim

A substrate manufacturing apparatus includes a test apparatus including a test handler module for performing a test process on a substrate. The test handler module may include a conveyor unit to transfer a substrate, a handler unit for performing a test process on the substrate, and a transfer unit for transferring the substrate between the conveyor unit and the handler unit. The conveyor unit may include a feed conveyor and a discharge conveyor spaced apart from the feed conveyor.

Apparatus and method for manufacturing substrates

A test handler and a test method of a semiconductor device using the same includes a plurality of chambers to provide a sealed inner space accommodating a first tray on which semiconductor devices are mounted, a test module electrically connected to the semiconductor devices in the chambers to perform a test process of the semiconductor devices, and a sort part to load and unload the first tray in the chambers and to sort semiconductor devices determined to be failed in the test process. The plurality of chambers have a fluid path circulating a coolant or a heat medium in the walls so that a temperature of the plurality of chambers is rapidly changed at the test process of the semiconductor devices between a first temperature that is less than room temperature and a second temperature that is greater than room temperature.

Test handler that rapidly transforms temperature and method of testing semiconductor device using the same

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Asan-si, South Korea

Jea-Muk Oh