Samsung Electronics Co., Ltd.

Jea-Eun Jess Shim

Sang-Young Lee

Jin-Man Kim

Jong-Bum Park

Kwang-Bo Sim

Hee-Sam Kim

An ESC may include a dielectric layer, an electrode, a pedestal, a heater, an adhesive and a protecting ring. The dielectric layer may be configured to support a substrate. The electrode may be disposed in the dielectric layer and is configured to form plasma over the substrate. The pedestal may be disposed under the dielectric layer. The heater may be disposed between the pedestal and the dielectric layer and is configured to heat the substrate. The adhesive may be disposed between the pedestal and the heater, and between the heater and the dielectric layer. The protecting ring may be configured to surround the adhesive. The protecting ring may include a plasma-resistant material.

Growing community of inventors

Hwaseong-si, South Korea

Jea-Eun Jess Shim