Samsung Display Co., Ltd.

Philoptics Co., Ltd

Je Kil Ryu

Gyoo Wan Han

Hae Sook Lee

Emil Aslanov

Tae Yong Kim

Kyung Hoon Chung

Akifumi Sangu

Il Young Jeong

Cheol Lae Roh

Tae Hyoung Cho

Jong Nam Moon

Ki Su Han

Jeong Hun Woo

Cheol Ho Park

Voronov Alexander

Young Su Chae

Jun Ho Park

Young Geun Cho

Jin Hong Jeun

Vladimir Tokarev

Seong Jin Yeon

A laser device includes a light source part; an optical path adjustment part; a light distribution part that splits a laser beam into a plurality of sub-beams to a substrate; a drive part that moves the light distribution part and adjusts relative positions between the light distribution part and the substrate; a sensing part; and a control part. The control part generates an image based on a signal sensed by the sensing part and measures an image contrast of the image. The control part records and compares a plurality of image contrasts according to the position of the light distribution part to determine an optimal position of the light distribution part.

Laser device and method of aligning laser device

A laser crystallization apparatus according to an embodiment includes: a light source unit which irradiates a laser beam; and a path conversion unit which converts the laser beam incident from the light source unit into a linear beam having a long axis parallel to a first direction and a short axis parallel to a second direction. The linear beam propagates in a third direction perpendicular to the first direction and the second direction, the path conversion unit includes an incident window extending parallel to a first length direction, an emission window extending parallel to a second direction, a first reflection unit disposed at the same side with the incident window, and a second reflection unit disposed at the same side with the emission window, and the second length direction extends parallel to the first direction in a view of the third direction.

Laser crystallization apparatus

An apparatus for manufacturing a display device includes a chamber, a laser module including a plurality of laser generators which respectively generates a plurality of raw laser beams using a solid material as a medium, a beam coupling module which combines the plurality of raw laser beams into a plurality of coupling beams, a beam mixing unit which converts the plurality of coupling beams into a plurality of mixing beams, a micro smoother which induces vibration movements of the plurality of mixing beams, an optical module which converts the plurality of mixing beams passed through the micro smoother into a final laser beam, and directs the final laser beam to the chamber, and a seal box disposed between the optical module and the chamber.

Apparatus for manufacturing display device

A laser processing apparatus includes a laser source which generates a laser beam; a scanner unit disposed in an optical path of the laser beam from the laser source and which adjusts the optical path of the laser beam from the laser source in a first direction or in a second direction different from the first direction; and a reflector unit disposed in an optical path of the laser beam adjusted by the scanner unit and which reflects the laser beam adjusted by the scanner unit, where the reflector unit includes a first sub-reflector unit which shifts an optical path of the laser adjusted by the scanner unit in the first direction, and a second sub-reflector unit which shifts an optical path of the laser beam adjusted by the scanner unit in a third direction opposite to the first direction.

Laser processing apparatus

A laser processing apparatus includes a laser beam generating unit which emits a laser beam, a lens unit which divides the laser beam into a plurality of laser beams, and a light condensing unit which condenses the plurality of laser beams. The lens unit includes a first lens array having a first central axis and a second lens array having a second central axis, and wherein at least one of the first lens array and the second lens array reciprocates such that the first central axis and the second central axis are deviated from each other.

Laser processing apparatus and method for manufacturing the same

A method for cutting a substrate includes: radiating, as part of a first laser radiating process, a laser towards a surface of the substrate to form a first groove in a substrate. Radiating the laser towards the surface includes radiating, in sequence, the laser towards a first outer point (FOP), a second outer point (SOP), a first intermediate point (FIP), a second intermediate point (SIP), and a first cut point (FCP) of the surface, each of the points being spaced apart from one another by one or more distances. The FCP corresponds to a cut line of the substrate. The FOP and the SOP are respectively disposed at lateral sides of the FCP. The FIP is disposed between the FCP and the FOP. The SIP is disposed between the FCP and the SOP. The same kind and intensity of laser is radiated towards each of the points.

Method for cutting substrate

A method of excimer laser annealing includes generating a focused long line beam with a laser beam output from at least one laser source; and scanning the long line beam in a direction perpendicular to a long axis of the long line beam along a surface of an amorphous semiconductor film on a substrate. The long line beam has a normalized beam angular divergence half-width &#x3c6;=arctan(tan &#x3b8;/sin &#x3b8;) that is less than a critical value &#x3c6;, where &#x3b8;represents a beam angular divergence half-width measured along the long axis of the long line beam on the surface of the amorphous semiconductor film, &#x3b8; represents a mean incidence angle of the long line beam on the surface of the amorphous semiconductor film, and &#x3c6;is approximately 30&#xb0;.

Method of excimer laser annealing

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Yongin-si, South Korea

Je Kil Ryu