Uchicago Argonne, LLC

Jayson W Anton

Deming Shu

Steven P Kearney

Jorg M Maser

Barry Lai

Christian Roehrig

Lahsen Assoufid

Xianbo Shi

Jonathan Z Tischler

Ross J Harder

Tim M Mooney

Wenjun Liu

William F Toter

A method and a novel flexure interface apparatus are provided for ultrahigh-vacuum (UHV) applications for precision nanopositioning systems. An ultrahigh-vacuum (UHV) metrology base is integrated with an ultrahigh-vacuum (UHV) flange together including a precision and compact flexure interface structure defining a UHV metrology base near-zero-length feedthrough. The UHV metrology base is directly mounted to a flange mounting surface in air with nanopositioning and thermal stability. The precision and compact flexure interface structure has sufficient strength to hold the vacuum force and sufficiently flexible to survive with the thermal expansion stress during bakeout process.

Method and mechanical design of a flexure interface for ultra-high-vacuum nanopositioning Invar base near-zero-length feedthrough

The present disclosure relates to a flexure mechanism that includes a plurality of thin material structures, each thin material structure including a weak-link portion and a separable constraint portion. The separable constraint portion is linked to the weak-link portion and configured to stabilize the weak-link portion. Additionally, the plurality of thin material structures are stacked and secured together to form a laminar structure.

Constrained flexure mechanism and method for manufacturing the same

An enhanced method and precision nanopositioning apparatus for implementing enhanced nanopositioning performance is provided. The nanopositioning apparatus includes a vertical linear nanopositioning flexure stage and a horizontal linear nanopositioning flexure stage. The vertical linear nanopositioning flexure stage includes a stage base, a symmetrically configured flexure linear guiding mechanism with precision motion enhancement structure, and a stage carriage. The horizontal linear nanopositioning flexure stage is mounted on the stage carriage of the vertical linear nanopositioning flexure stage, and includes a middle-bar relative position control mechanism to enhance the stiffness of a flexure linear guiding mechanism.

Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance

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Chicago, IL, United States of America

Jayson W Anton